Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Volume III :
Clasificación: | Libro Electrónico |
---|---|
Autor principal: | Madou, Marc J. (Autor) |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Boca Raton, Florida ; London, [England] ; New York :
CRC Press,
2011.
|
Edición: | Third edition. |
Temas: | |
Acceso en línea: | Texto completo |
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