Lithography : principles, processes and materials /

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Hennessy, Theodore C.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York : Nova Science, c2011.
Colección:Engineering tools, techniques and tables.
Nanotechnology science and technology series.
Temas:
Microlithography.
Microfabrication.
Microlithographie.
TECHNOLOGY & ENGINEERING > Electronics > Circuits > General.
Microfabrication
Microlithography
Acceso en línea:Texto completo
Descripción
Notas:Includes bibliographical references and index.
Descripción Física:1 online resource.
Bibliografía:""REFERENCES""""LITHOGRAPHY: PRINCIPLES,PROCESSES AND MATERIALS""; ""ABSTRACT""; ""1. INTRODUCTION""; ""2. PRINCIPLE OF LITHOGRAPHY""; ""3. PROCESSES OF LITHOGRAPHY""; ""3.1. RIE-NSL Lithography [32]""; ""3.2. FIB Lithography""; ""3.3. Laser Interference Lithography""; ""4. MATERIALS OF LITHOGRAPHY""; ""4.1. Materials of RIE-NSL Lithography""; ""4.2. Materials of FIB Lithography""; ""4.3. Materials of Laser Interference Lithography""; ""5. CONCLUSIONS""; ""REFERENCES""; ""LASER INTERFERENCE LITHOGRAPHY""; ""ABSTRACT""; ""1. INTRODUCTION""; ""2. THEORY""; ""3. INSTRUMENTATION""
Includes bibliographical references and index.
ISBN:9781611221237
1611221234

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