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MEMS Silicon Oscillating Accelerometers and Readout Circuits
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the ca...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Aalborg :
River Publishers,
2019.
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| Colección: | River Publishers series in circuits and systems.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1
- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity
- 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2
- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA
- 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3
- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit
- 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4
- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing
- 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC