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MEMS Silicon Oscillating Accelerometers and Readout Circuits
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the ca...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Aalborg :
River Publishers,
2019.
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| Colección: | River Publishers series in circuits and systems.
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| Temas: | |
| Acceso en línea: | Texto completo |