Cargando…
MEMS Silicon Oscillating Accelerometers and Readout Circuits
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the ca...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Aalborg :
River Publishers,
2019.
|
| Colección: | River Publishers series in circuits and systems.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 4500 | ||
|---|---|---|---|
| 001 | EBSCO_on1090023490 | ||
| 003 | OCoLC | ||
| 005 | 20231017213018.0 | ||
| 006 | m o d | ||
| 007 | cr |n|---||||| | ||
| 008 | 190316s2019 xx o 000 0 eng d | ||
| 040 | |a EBLCP |b eng |e pn |c EBLCP |d YDX |d UKAHL |d OCLCQ |d N$T |d OCLCQ |d OCLCF |d OCLCQ |d K6U |d OCLCO |d OCLCQ |d TYFRS |d PSYSI |d OCLCQ |d OCLCO | ||
| 019 | |a 1090011655 |a 1090076649 |a 1090283640 |a 1196162243 | ||
| 020 | |a 8770220441 | ||
| 020 | |a 9788770220446 |q (electronic bk.) | ||
| 020 | |a 9781003338826 |q (electronic bk.) | ||
| 020 | |a 1003338828 |q (electronic bk.) | ||
| 020 | |a 9781000796896 |q (electronic bk. : EPUB) | ||
| 020 | |a 1000796892 |q (electronic bk. : EPUB) | ||
| 020 | |a 9781000793734 |q (electronic bk. : PDF) | ||
| 020 | |a 1000793737 |q (electronic bk. : PDF) | ||
| 020 | |z 877022045X | ||
| 020 | |z 9788770220453 | ||
| 024 | 7 | |a 10.1201/9781003338826 |2 doi | |
| 029 | 1 | |a AU@ |b 000065231067 | |
| 035 | |a (OCoLC)1090023490 |z (OCoLC)1090011655 |z (OCoLC)1090076649 |z (OCoLC)1090283640 |z (OCoLC)1196162243 | ||
| 037 | |a 9781003338826 |b Taylor & Francis | ||
| 050 | 4 | |a TA165 | |
| 072 | 7 | |a SCI |x 024000 |2 bisacsh | |
| 072 | 7 | |a TEC |x 008070 |2 bisacsh | |
| 072 | 7 | |a TJF |2 bicssc | |
| 082 | 0 | 4 | |a 681.2 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Xu, Yong Ping. | |
| 245 | 1 | 0 | |a MEMS Silicon Oscillating Accelerometers and Readout Circuits |
| 260 | |a Aalborg : |b River Publishers, |c 2019. | ||
| 300 | |a 1 online resource (314 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a River Publishers Series in Circuits and Systems Ser. | |
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1 -- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity | |
| 505 | 8 | |a 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2 -- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA | |
| 505 | 8 | |a 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3 -- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit | |
| 505 | 8 | |a 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4 -- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing | |
| 505 | 8 | |a 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC | |
| 500 | |a 4.7 Experiment Results of a Prototype PLL-based MEMS SOA | ||
| 520 | |a Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic. | ||
| 545 | 0 | |a Yong Ping Xu | |
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Accelerometers. | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 6 | |a Accéléromètres. | |
| 650 | 6 | |a Microsystèmes électromécaniques. | |
| 650 | 7 | |a accelerometers. |2 aat | |
| 650 | 7 | |a SCIENCE / Energy |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a Accelerometers |2 fast | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 776 | 0 | 8 | |i Print version: |a Xu, Yong Ping. |t MEMS Silicon Oscillating Accelerometers and Readout Circuits. |d Aalborg : River Publishers, ©2019 |z 9788770220453 |
| 830 | 0 | |a River Publishers series in circuits and systems. | |
| 856 | 4 | 0 | |u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=2112226 |z Texto completo |
| 936 | |a BATCHLOAD | ||
| 938 | |a Askews and Holts Library Services |b ASKH |n AH36062242 | ||
| 938 | |a EBSCOhost |b EBSC |n 2112226 | ||
| 938 | |a YBP Library Services |b YANK |n 16110695 | ||
| 994 | |a 92 |b IZTAP | ||