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|a International Conference on Advanced Micro Device Engineering
|n (8th :
|d 2016 :
|c Kiryū-shi, Japan),
|j issuing body.
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|a Advanced micro-device engineering VIII :
|b selected, peer reviewed papers from the 3rd International Symposium of Gunma University Medical Innovation and 8th International Conference on Advanced Micro Device Engineering (GUMI & AMDE 2016), December 9, 2016, Kiryu, Japan /
|c edited by Osamu Hanaizumi.
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|a Pfaffikon, Switzerland :
|b Trans Tech Publications Ltd.,
|c [2018]
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|a Online resource; title from PDF title page (EBSCO, viewed Feburary 5, 2019).
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|a Nanotechnology
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|a Microelectromechanical systems
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|a Miniature electronic equipment
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|a Microelectronics
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|a Mechatronics
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650 |
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|a Microsystèmes électromécaniques
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650 |
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|a Équipement électronique miniaturisé
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|a Conference papers and proceedings
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|a Kasuya, Ken-ichi
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|a International Symposium of Gunma University Medical Innovation
|n (3rd :
|d 2016)
|j issuing body.
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776 |
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|i Print version:
|a International Conference on Advanced Micro-Device Engineering (8th : 2016 : Kiryū-shi, Japan) issuing body.
|t Advanced micro-device engineering VIII.
|d Pfaffikon, Switzerland : Trans Tech Publications Ltd., [2018]
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