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Ultra clean processing of semiconductor surfaces XIV : 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018) held in Bruges, Belgium, September 22-24, 2008 /
| Clasificación: | Libro Electrónico |
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| Autor Corporativo: | |
| Otros Autores: | , |
| Formato: | Electrónico Congresos, conferencias eBook |
| Idioma: | Inglés |
| Publicado: |
Stafa-Zuerich, Switzerland :
Trans Tech Publications Ltd,
[2018]
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| Temas: | |
| Acceso en línea: | Texto completo |
| Notas: | "Selected, peer reviewed papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium." |
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| Descripción Física: | 1 online resource : color illustrations |
| Bibliografía: | Includes bibliographical references and indexes. |
| ISBN: | 9783035734171 3035734178 |