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| LEADER |
00000cam a2200000Mu 4500 |
| 001 |
EBSCO_ocn988871957 |
| 003 |
OCoLC |
| 005 |
20231017213018.0 |
| 006 |
m o d |
| 007 |
cr |n|---||||| |
| 008 |
170603s2016 sz ob 001 0 eng d |
| 040 |
|
|
|a EBLCP
|b eng
|e pn
|c EBLCP
|d OCLCQ
|d YDX
|d N$T
|d IGB
|d AGLDB
|d CN8ML
|d D6H
|d OCLCQ
|d VTS
|d S9I
|d STF
|d M8D
|d OCLCQ
|d AJS
|d OCLCO
|d OCLCQ
|
| 019 |
|
|
|a 959039377
|a 975966862
|a 976041147
|a 976195257
|a 1264899545
|
| 020 |
|
|
|a 9783035730845
|
| 020 |
|
|
|a 3035730849
|
| 020 |
|
|
|z 3035710848
|
| 020 |
|
|
|z 9783035710847
|
| 035 |
|
|
|a (OCoLC)988871957
|z (OCoLC)959039377
|z (OCoLC)975966862
|z (OCoLC)976041147
|z (OCoLC)976195257
|z (OCoLC)1264899545
|
| 050 |
|
4 |
|a QC611.6.S9
|b U377 2016
|
| 072 |
|
7 |
|a TEC
|x 009070
|2 bisacsh
|
| 072 |
|
7 |
|a SCI
|x 021000
|2 bisacsh
|
| 072 |
|
7 |
|a SCI
|x 022000
|2 bisacsh
|
| 082 |
0 |
4 |
|a 621.38152
|
| 049 |
|
|
|a UAMI
|
| 100 |
1 |
|
|a Mertens, Paul W.
|
| 245 |
1 |
0 |
|a Ultra Clean Processing of Semiconductor Surfaces XIII.
|
| 260 |
|
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|a Zurich :
|b Trans Tech Publications,
|c 2016.
|
| 300 |
|
|
|a 1 online resource (395 pages)
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
|
| 338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
| 347 |
|
|
|a data file
|2 rda
|
| 490 |
1 |
|
|a Solid State Phenomena Vol. 255
|
| 588 |
0 |
|
|a Print version record.
|
| 504 |
|
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|a Includes bibliographical references at the end of each chapters and index.
|
| 590 |
|
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|a eBooks on EBSCOhost
|b EBSCO eBook Subscription Academic Collection - Worldwide
|
| 650 |
|
0 |
|a Semiconductors
|x Surfaces
|v Congresses.
|
| 650 |
|
0 |
|a Semiconductors
|v Congresses.
|
| 650 |
|
6 |
|a Semi-conducteurs
|x Surfaces
|v Congrès.
|
| 650 |
|
6 |
|a Semi-conducteurs
|v Congrès.
|
| 650 |
|
7 |
|a SCIENCE
|x Physics
|x Electricity.
|2 bisacsh
|
| 650 |
|
7 |
|a SCIENCE
|x Physics
|x Electromagnetism.
|2 bisacsh
|
| 650 |
|
7 |
|a Semiconductors.
|2 fast
|0 (OCoLC)fst01112198
|
| 650 |
|
7 |
|a Semiconductors
|x Surfaces.
|2 fast
|0 (OCoLC)fst01112259
|
| 655 |
|
7 |
|a Conference papers and proceedings.
|2 fast
|0 (OCoLC)fst01423772
|
| 700 |
1 |
|
|a Meuris, Marc.
|
| 700 |
1 |
|
|a Heyns, Marc.
|
| 776 |
0 |
8 |
|i Print version:
|a Mertens, Paul W.
|t Ultra Clean Processing of Semiconductor Surfaces XIII.
|d Zurich : Trans Tech Publications, ©2016
|z 9783035710847
|
| 830 |
|
0 |
|a Solid State Phenomena Vol. 255.
|
| 856 |
4 |
0 |
|u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1355752
|z Texto completo
|
| 938 |
|
|
|a ProQuest Ebook Central
|b EBLB
|n EBL4761135
|
| 938 |
|
|
|a EBSCOhost
|b EBSC
|n 1355752
|
| 938 |
|
|
|a YBP Library Services
|b YANK
|n 13181157
|
| 994 |
|
|
|a 92
|b IZTAP
|
