Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /
Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Appl...
Clasificación: | Libro Electrónico |
---|---|
Autor Corporativo: | International Symposium on Ultra Clean Processing of Semiconductor Surfaces Brussels, Belgium |
Otros Autores: | Mertens, Paul (Editor ), Meuris, Marc (Editor ), Heyns, Marc (Editor ) |
Formato: | Electrónico Congresos, conferencias eBook |
Idioma: | Inglés |
Publicado: |
Pfaffikon, Switzerland :
TTP,
2014.
|
Colección: | Diffusion and defect data. Solid state phenomena ;
v. 219. |
Temas: | |
Acceso en línea: | Texto completo |
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