Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /

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Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Appl...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Brussels, Belgium
Otros Autores: Mertens, Paul (Editor ), Meuris, Marc (Editor ), Heyns, Marc (Editor )
Formato: Electrónico Congresos, conferencias eBook
Idioma:Inglés
Publicado: Pfaffikon, Switzerland : TTP, 2014.
Colección:Diffusion and defect data. Solid state phenomena ; v. 219.
Temas:
Semiconductors > Congresses.
Semi-conducteurs > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Semiconductors.
Conference papers and proceedings.
Acceso en línea:Texto completo
Descripción
Sumario:Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Applications: Beyond-Si Active Area, Chapter 3: Wet Etching for FEOL Applications, Chapter 4: Wet Processing of High Aspect Ratio Structures, Chapter 5: Fluid Dynamics, Cleaning Mechanics, Chapter 6: Photo Resist Performance and Rework, Chapter 7: Cleaning for BEOL Interconnect Applications, Chapter 8: Cleaning for 3D Applications, Chapter 9: Contamination Control and AMC, Chapter 10: Cleaning and Wet Etching for Semiconductor Photo-Voltaic Cells Keyword: Ultra-cleaning, precision cleaning, wet cleaning, Semiconductor Surfaces, contamination control, surface impurities, surface defects, Integrated circuits, Micro-electronic structures, photovoltaic processing, proceedings UCPSS.
Descripción Física:1 online resource (331 pages) : illustrations
Bibliografía:Includes bibliographical references at the end of each chapters and index.
ISBN:9783038266266
3038266264
ISSN:1662-7799 ;

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