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Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing - some components are now just a few dozen atoms wide. This book attempts to answer the questions, &...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Philadelphia, PA :
Woodhead Pub.,
2014.
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| Colección: | Woodhead Publishing series in electronic and optical materials ;
no. 42. |
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing - some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next?? and "How do we get there??Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the re |
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| Descripción Física: | 1 online resource (599 pages) : illustrations |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9780857098757 0857098756 |
| ISSN: | 2050-1501 ; 2050-1501 |