Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications /
This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
Clasificación: | Libro Electrónico |
---|---|
Autor principal: | Vaz, Filipe |
Otros Autores: | Martin, Nicolas, Fenker, Martin |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Sharjah :
Bentham Science Publishers,
2013.
|
Temas: | |
Acceso en línea: | Texto completo |
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