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Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications /
This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Sharjah :
Bentham Science Publishers,
2013.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | EBSCO_ocn854975260 | ||
| 003 | OCoLC | ||
| 005 | 20231017213018.0 | ||
| 006 | m o d | ||
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| 008 | 130803s2013 xx o 000 0 eng d | ||
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| 020 | |a 9781608051564 |q (electronic bk.) | ||
| 020 | |a 1608051560 |q (electronic bk.) | ||
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| 100 | 1 | |a Vaz, Filipe. | |
| 245 | 1 | 0 | |a Metallic oxynitride thin films by reactive sputtering and related deposition methods : |b processes, properties and applications / |c Filipe Vaz. |
| 260 | |a Sharjah : |b Bentham Science Publishers, |c 2013. | ||
| 300 | |a 1 online resource (363 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 520 | |a This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Cover ; Title ; Contents ; About the Editors ; Foreword ; Preface ; List of Contributors ; Part 1 ; Chapter 01 ; Chapter 02 ; Chapter 03 ; Part 2 ; Chapter 04 ; Chapter 05 ; Chapter 06 ; Chapter 07 ; Chapter 08 ; Part 3 ; Chapter 09 ; Chapter 10 ; Chapter 11 ; Chapter 12 ; Author index ; Subject index. | |
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Thin films. | |
| 650 | 6 | |a Couches minces. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Mechanical. |2 bisacsh | |
| 650 | 7 | |a Thin films |2 fast | |
| 700 | 1 | |a Martin, Nicolas. | |
| 700 | 1 | |a Fenker, Martin. | |
| 776 | 0 | 8 | |i Print version: |a Vaz, Filipe. |t Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications. |d Sharjah : Bentham Science Publishers, ©2013 |z 9781608051571 |
| 856 | 4 | 0 | |u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=606313 |z Texto completo |
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