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Borophosphosilicate glass thin films in electronics /
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés Ruso |
| Publicado: |
New York :
Nova Science Publishers,
[2013]
|
| Colección: | Materials science and technologies series.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | EBSCO_ocn854583694 | ||
| 003 | OCoLC | ||
| 005 | 20231017213018.0 | ||
| 006 | m o d | ||
| 007 | cr ||||||||||| | ||
| 008 | 130411s2013 nyu ob 001 0 eng | ||
| 010 | |a 2020687136 | ||
| 040 | |a DLC |b eng |e rda |c DLC |d E7B |d YDXCP |d OCLCF |d MEU |d EBLCP |d AGLDB |d VTS |d AU@ |d M8D |d N$T |d OCLCO |d AJS |d OCLCO |d OCLCQ |d OCLCO | ||
| 019 | |a 858126055 | ||
| 020 | |z 9781626180345 |q (ebook) | ||
| 020 | |a 9781624179594 |q (hardcover) | ||
| 020 | |a 1624179592 | ||
| 020 | |a 1626180342 |q (electronic bk.) | ||
| 020 | |a 9781626180345 |q (electronic bk.) | ||
| 029 | 1 | |a AU@ |b 000062327189 | |
| 029 | 1 | |a DEBBG |b BV043779354 | |
| 029 | 1 | |a NZ1 |b 15195150 | |
| 029 | 1 | |a DEBSZ |b 45073952X | |
| 035 | |a (OCoLC)854583694 |z (OCoLC)858126055 | ||
| 041 | 1 | |a eng |h rus | |
| 050 | 0 | 0 | |a TK7871.15.S55 |
| 072 | 7 | |a TEC |x 008010 |2 bisacsh | |
| 082 | 0 | 0 | |a 621.3815/31 |2 23 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Vasilʹev, V. I͡U. |q (Vladislav I͡Urʹevich) | |
| 240 | 1 | 0 | |a Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoæi mikroçelektroniki. |l English |
| 245 | 1 | 0 | |a Borophosphosilicate glass thin films in electronics / |c Vladislav Yu. Vasilyev. |
| 264 | 1 | |a New York : |b Nova Science Publishers, |c [2013] | |
| 300 | |a 1 online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Materials science and technologies | |
| 490 | 0 | |a Electronics and telecommunications research | |
| 500 | |a Translation of: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki. | ||
| 504 | |a Includes bibliographical references (pages 221-234) and index. | ||
| 588 | |a Description based on print version record and CIP data provided by publisher. | ||
| 505 | 0 | |a BOROPHOSPHOSILICATE GLASS THIN FILMS IN ELECTRONICS ; Library of Congress Cataloging-in-Publication Data ; CONTENTS ; PREFACE ; LIST OF ABBREVIATIONS (IN ORDER OF APPEARANCE) ; LIST OF IMPORTANT SYMBOLS (IN ORDER OF APPEARANCE); INTRODUCTION ; PART 1. BPSG THIN FILM DEPOSITION; Chapter 1 BRIEF HISTORICAL OVERVIEW OF BPSG THIN FILM RESEARCH ; Chapter 2 BASIC BPSG FILM CVD TOOLS AND METHODOLOGY ; 2.1. CVD PROCESS COMPOUNDS ; 2.2. BASIC CVD TOOL DESIGN FOR SILICON DIOXIDE AND GLASS FILM DEPOSITION ; 2.3. SOME BASIC THIN FILM CVD PROCESS PARAMETERS. | |
| 505 | 8 | |a Chapter 3 BASIC BPSG CVD KINETIC FEATURES 3.1. BASIC THIN FILM CVD KINETIC FEATURES ; 3.2. BASIC SILICON DIOXIDE THIN FILM CVD KINETIC FEATURES ; 3.3. BASIC SILICATE GLASS THIN FILM CVD KINETIC FEATURES ; 3.4. BASIC AEROSOL FORMATION FEATURES AT GLASS CVD ; Chapter 4 AS-DEPOSITED BPSG FILM STEP COVERAGE AND GAP-FILL ; 4.1. BASIC DEFINITIONS OF STEPPED DEVICE STRUCTURES ; 4.2. BASIC DEFINITIONS FOR THIN FILM CVD ON STEPPED DEVICE STRUCTURES ; 4.3. CHARACTERIZATION OF CVD PROCESSES ON STEPPED STRUCTURES ; 4.4. IMPROVEMENT OF GLASS FILM CVD ON STEPPED STRUCTURES. | |
| 505 | 8 | |a Chapter 5 GLASS FILM CVD SCHEMES 5.1. GENERAL THIN FILM CVD PROCESS SCHEME ; 5.2. CVD THIN FILM DEPOSITION PROCESSES CLASSIFICATION ; 5.3. THIN FILM SIO AND SILICATE GLASS DEPOSITION PROCESSES SCHEMES 2; Chapter 6 BPSG FILM INDUSTRIAL CVD TECHNOLOGY ; FINAL REMARKS ON PART 1 ; PART 2. BPSG FILM COMPOSITION, STRUCTURE, AND PROPERTIES ; Chapter 7 BRIEF REVIEW ON BPSG THIN FILM ANALYSIS TECHNIQUES ; 7.1. ANALYTICAL METHODS OVERVIEW ; 7.2. FTIR METHOD IMPLEMENTATION BPSG FILM COMPOSITION ANALYSIS ; 7.3. LASER SCANNING METHOD ; 7.4. MICROSCOPY METHODS. | |
| 505 | 8 | |a 7.5. TOTAL CHARGE MAPPING METHODS 7.6. SECONDARY ION MASS SPECTROMETRY METHOD ; Chapter 8 BPSG FILM COMPOSITION ; Chapter 9 BPSG FILM STRUCTURE ; 9.1. BRIEF REVIEW OF SILICA STRUCTURE: BASICS AND TERMS ; 9.2. BRIEF REVIEW OF BORON OXIDE AND PHOSPHORUS OXIDE STRUCTURES ; 9.3. BPSG COMPOSITION AND STRUCTURE ; 9.4. DIFFERENCES IN BPSG COMPOSITION AND STRUCTURE ; Chapter 10 BASIC BPSG FILM PROPERTIES ; 10.1. SURFACE MORPHOLOGY OF THIN GLASS FILMS ; 10.2. FILM MECHANICAL STRESS ; 10.3. FILM DENSITY -- FILM POROSITY -- FILM SHRINKAGE ; 10.4. FILM WET ETCH RATE. | |
| 505 | 8 | |a 10.5. GETTERING PROPERTIES OF BPSG FILMS10.6. ELECTRICAL PROPERTIES OF BPSG FILMS ; 10.7. SUMMARIES OF BPSG FILM PROPERTIES FOR PRODUCTION PROCESSES ; Chapter 11 BPSG FILM FLOW CAPABILITY ; 11.1. BRIEF DESCRIPTION OF GLASS FLOW BASICS ; 11.2. GLASS STRUCTURE FEATURES AND GLASS FLOW CAPABILITY ; 11.3. APPLICATION OF BULK GLASS PARAMETERS TO GLASS THIN FILM ; Chapter 12 BPSG FILM -- AMBIENT MOISTURE INTERACTION ; 12.1. TECHNIQUE FOR ANALYSIS OF MOISTURE EFFECTS IN THIN GLASS FILMS ; 12.2. FILM-MOISTURE INTERACTION ; 12.3. DESCRIPTION OF MOISTURE ABSORPTION EFFECTS IN BPSG FILMS. | |
| 546 | |a Text in English. | ||
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Electronic apparatus and appliances |x Materials. | |
| 650 | 0 | |a Glass coatings. | |
| 650 | 0 | |a Boron compounds. | |
| 650 | 0 | |a Silicon compounds. | |
| 650 | 0 | |a Glass manufacture |x Chemistry. | |
| 650 | 2 | |a Boron Compounds | |
| 650 | 2 | |a Silicon Compounds | |
| 650 | 6 | |a Verre |x Revêtements protecteurs. | |
| 650 | 6 | |a Bore |x Composés. | |
| 650 | 6 | |a Silicium |x Composés. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Circuits |x General. |2 bisacsh | |
| 650 | 7 | |a Boron compounds |2 fast | |
| 650 | 7 | |a Electronic apparatus and appliances |x Materials |2 fast | |
| 650 | 7 | |a Glass coatings |2 fast | |
| 650 | 7 | |a Glass manufacture |x Chemistry |2 fast | |
| 650 | 7 | |a Silicon compounds |2 fast | |
| 700 | 1 | |a Vasilʹev, V. I͡U. |q (Vladislav I͡Urʹevich) | |
| 776 | 0 | 8 | |i Print version: |t Borophosphosilicate glass thin films in electronics |d New York : Nova Science Publishers, Inc., [2013] |z 9781624179594 (hardcover) |w (DLC) 2013002527 |
| 830 | 0 | |a Materials science and technologies series. | |
| 856 | 4 | 0 | |u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=619652 |z Texto completo |
| 938 | |a YBP Library Services |b YANK |n 10898411 | ||
| 938 | |a EBSCOhost |b EBSC |n 619652 | ||
| 938 | |a ebrary |b EBRY |n ebr10738768 | ||
| 938 | |a ProQuest Ebook Central |b EBLB |n EBL3022846 | ||
| 994 | |a 92 |b IZTAP | ||