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Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China /
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor Corporativo: | |
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Stafa-Zurich ; Enfield, NH :
Trans Tech Publications,
2012.
|
| Colección: | Key engineering materials ;
v. 503. |
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 110 | 2 | |a Zhongguo wei mi na mi ji shu xue hui. |b Conference |n (13th : |d 2011 : |c Changzhou (Jiangsu Sheng, China)) | |
| 245 | 1 | 0 | |a Micro-nano technology XIII : |b selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China / |c edited by Xiaohao Wang. |
| 260 | |a Stafa-Zurich ; |a Enfield, NH : |b Trans Tech Publications, |c 2012. | ||
| 300 | |a 1 online resource : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
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| 490 | 1 | |a Key engineering materials, |x 1013-9826 ; |v v. 503 | |
| 504 | |a Includes bibliographical references and indexes. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane. | |
| 505 | 8 | |a New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. | |
| 505 | 8 | |a A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone. | |
| 505 | 8 | |a Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution. | |
| 505 | 8 | |a Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization. | |
| 520 | |a These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re. | ||
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Nanotechnology |v Congresses. | |
| 650 | 0 | |a Microtechnology |v Congresses. | |
| 650 | 6 | |a Microtechnologie |v Congrès. | |
| 650 | 6 | |a Nanotechnologie |v Congrès. | |
| 650 | 7 | |a SCIENCE |x Nanoscience. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Nanotechnology & MEMS. |2 bisacsh | |
| 650 | 7 | |a Microtechnology |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 655 | 7 | |a Conference papers and proceedings |2 fast | |
| 700 | 1 | |a Wang, Xiaohao. | |
| 776 | 0 | 8 | |i Print version: |a Chinese Society of Micro/Nano Technology. Conference (13th : 2011 : Changzhou (Jiangsu Sheng, China)). |t Micro-nano technology XIII. |d Stafa-Zurich ; Enfield, NH : Trans Tech Publications, 2012 |z 9783037853641 |w (DLC) 2012418417 |w (OCoLC)794588644 |
| 830 | 0 | |a Key engineering materials ; |v v. 503. | |
| 856 | 4 | 0 | |u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=517147 |z Texto completo |
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| 938 | |a Trans Tech Publications, Ltd |b TRAN |n 10.4028/www.scientific.net/KEM.503 | ||
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