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X-ray scattering from semiconductors /

X-ray scattering is used extensively to provide detailed structural information about materials. Semiconductors have benefited from X-ray scattering techniques as an essential feedback method for crystal growth, including compositional and thickness determination of thin layers. The methods have bee...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Fewster, Paul F.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London : Imperial College Press, 2000.
Temas:
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Ch. 1. An introduction to semiconductor materials
  • ch. 2. An introduction to X-ray scattering
  • ch. 3. Equipment for measuring diffraction patterns
  • ch. 4. A practical guide to the evaluation of structural parameters.