Gettering and defect engineering in semiconductor technology XIV : selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria /
The papers contained herein cover the most important and timely issues in the field of "Gettering and Defect Engineering in Semiconductor Technology", ranging from the theoretical analysis of defect problems to practical engineering solutions, with the emphasis on Si-based materials. Apart...
Clasificación: | Libro Electrónico |
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Autor Corporativo: | |
Otros Autores: | , |
Formato: | Electrónico Congresos, conferencias eBook |
Idioma: | Inglés |
Publicado: |
Durnten-Zuerich :
Trans Tech,
©2011.
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Colección: | Diffusion and defect data. Solid state phenomena ;
v. 178-179. |
Temas: | |
Acceso en línea: | Texto completo |