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Soft x-rays and extreme ultraviolet radiation : principles and applications /

"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BO...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Attwood, David T.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Cambridge ; New York : Cambridge University Press, 2000.
Temas:
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Ch. 1. Introduction
  • Ch. 2. Radiation and scattering at EUV and soft x-ray wavelengths
  • Ch. 3. Wave propagation and refractive index at EUV and soft x-ray wavelengths
  • Ch. 4. Multilayer interference coatings
  • Ch. 5. Synchrotron radiation
  • Ch. 6. Physics of hot dense plasmas
  • Ch. 7. Extreme ultraviolet and soft x-ray lasers
  • Ch. 8. Coherence at short wavelengths
  • Ch. 9. Soft x-ray microscopy with diffractive optics
  • Ch. 10. Extreme ultraviolet and x-ray lithography.