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Soft x-rays and extreme ultraviolet radiation : principles and applications /
"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BO...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Cambridge ; New York :
Cambridge University Press,
2000.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Ch. 1. Introduction
- Ch. 2. Radiation and scattering at EUV and soft x-ray wavelengths
- Ch. 3. Wave propagation and refractive index at EUV and soft x-ray wavelengths
- Ch. 4. Multilayer interference coatings
- Ch. 5. Synchrotron radiation
- Ch. 6. Physics of hot dense plasmas
- Ch. 7. Extreme ultraviolet and soft x-ray lasers
- Ch. 8. Coherence at short wavelengths
- Ch. 9. Soft x-ray microscopy with diffractive optics
- Ch. 10. Extreme ultraviolet and x-ray lithography.