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Soft x-rays and extreme ultraviolet radiation : principles and applications /
"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BO...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Cambridge ; New York :
Cambridge University Press,
2000.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--Jacket |
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| Descripción Física: | 1 online resource (xvi, 470 pages) : illustrations (some color) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781139164429 1139164422 9781139648936 1139648934 9781139638487 1139638483 |