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|a UAMI
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111 |
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|a International Symposium on Silicon Science
|n (6th :
|d 2010 :
|c Kiryū-shi, Japan)
|
245 |
1 |
0 |
|a Silicon science and advanced micro-device engineering II :
|b selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
|c edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.
|
260 |
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|a Durnten-Zurich :
|b Trans Tech Publications,
|c 2012.
|
300 |
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|a 1 online resource (311 pages) :
|b illustrations (some color).
|
336 |
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|a text
|b txt
|2 rdacontent
|
337 |
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|a computer
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|a online resource
|b cr
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|a data file
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490 |
1 |
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|a Key engineering materials,
|x 1662-9809 ;
|v v. 497
|
504 |
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|a Includes bibliographical references and indexes.
|
588 |
0 |
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|a Print version record.
|
505 |
0 |
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|a Chapter 1: Material science -- Chapter 2: Chemical science and techology -- Chapter 3: Nano-science and technology -- Chapter 4: Photonics device and technology -- Chapter 5: Novel measurement and system technology -- Chapter 6: Information and communication engineering.
|
520 |
8 |
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|a This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter.
|
546 |
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|a English.
|
590 |
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|a eBooks on EBSCOhost
|b EBSCO eBook Subscription Academic Collection - Worldwide
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650 |
|
0 |
|a Silicon
|v Congresses.
|
650 |
|
0 |
|a Nanostructures
|v Congresses.
|
650 |
|
0 |
|a Microelectronics
|v Congresses.
|
650 |
|
6 |
|a Silicium
|v Congrès.
|
650 |
|
6 |
|a Nanostructures
|v Congrès.
|
650 |
|
6 |
|a Microélectronique
|v Congrès.
|
650 |
|
7 |
|a TECHNOLOGY & ENGINEERING
|x Mechanical.
|2 bisacsh
|
650 |
|
7 |
|a Microelectronics
|2 fast
|
650 |
|
7 |
|a Nanostructures
|2 fast
|
650 |
|
7 |
|a Silicon
|2 fast
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655 |
|
7 |
|a Conference papers and proceedings
|2 fast
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700 |
1 |
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|a Hanaizumi, Osamu.
|
700 |
1 |
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|a Unno, Masafumi.
|
700 |
1 |
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|a Miura, Kenta.
|
711 |
2 |
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|a International Conference on Advanced Micro-Device Engineering
|n (2nd :
|d 2010 :
|c Kiryū-shi, Japan)
|
776 |
0 |
8 |
|i Print version:
|a International Symposium on Silicon Science (6th : 2010 : Kiryū-shi, Japan).
|t Silicon science and advanced micro-device engineering II.
|d Durnten-Zurich : Trans Tech Publications, 2012
|z 3037852852
|z 9783037852859
|w (OCoLC)774855392
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830 |
|
0 |
|a Key engineering materials ;
|v v. 497.
|x 1662-9809
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