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HeteroSiC & WASMPE 2011 : selected, peer reviewed papers from the 4th Workshop on Advanced Semiconductor Materials and Devices for Power Electronics Applications (HeteroSiC & WASMPE 2011), June 27-30, 2011, Tours, France /
The aim of this collection of peer-reviewed papers is to promote the open discussion of SiC hetero-epitaxy as related to the possibility of growing SiC on other materials and of growing various SiC polytypes so as to take advantage of the possibilities of band-gap engineering, These proceedings pres...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Switzerland :
Trans Tech Publications Ltd,
2012.
©2012 |
| Colección: | Materials science forum ;
v. 711. |
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- HeteroSiC & WASMPE 2011; Preface, Sponsors and Committees; Table of Contents; Chapter 1: SiC Heteroepitaxial Growth; Progress in 3C-SiC Growth and Novel Applications; Elimination of Twin Boundaries when Growing 3C-SiC Heteroepitaxial by Vapour-Liquid-Solid Mechanism on Patterned 4H-SiC Substrate; CVD Growth of 3C-SiC on 4H-SiC Substrate; The Influence of C3H8 and CBr4 on Structural and Morphological Properties of 3C-SiC Layers; Structural Characterization of Heteroepitaxial 3C-SiC; Consideration on the Thermal Expansion of 3C-SiC Epitaxial Layer on Si Substrates.
- Epitaxial Growth of 3C-SiC onto Silicon Substrate by VLS Transport Using CVD-Grown 3C-SiC Seeding LayerChapter 2: Microsystems and Microstructures Based on SiC; Study of 3C-SiC Mechanical Resonators, Filters and Mixers; Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application; Strain Field Analysis of 3C-SiC Free-Standing Microstructures by Micro-Raman and Theoretical Modelling; Elaboration of Monocrystalline Si Thin Film on 3C-SiC(100)/Si Epilayers by Low Pressure Chemical Vapor Deposition.
- Design of Digital Electronics for High Temperature Using Basic Logic Gates Made of 4H-SiC MESFETsThe Influence of Gate Material, SiO2 Fabrication Method and Gate Edge Effect on Interface Trap Density in 3C-SiC MOS Capacitors; Electrical Characteristics of SiC UV-Photodetector Device from the P-I-N Structure Behaviour to the Junction Barrier Schottky Structure Behaviour; Visible and Deep Ultraviolet Study of SiC/SiO2 Interface; High Temperature Capability of High Voltage 4H-SiC JBS; Parallel and Serial Association of SiC Light Triggered Thyristors.
- Nano-Analytical and Electrical Characterization of 4H-SiC MOSFETsChapter 4: Characterization: Devices and Material; Structural Characterization of Graphene Grown by Thermal Decomposition of Off-Axis 4H-SiC (0001); Seeding Layer Influence on the Low Temperature Photoluminescence Intensity of 3C-SiC Grown on 6H-SiC by Sublimation Epitaxy; Dose Influence on Physical and Electrical Properties of Nitrogen Implantation in 3C-SiC on Si; On Applicability of Time-Resolved Optical Techniques for Characterization of Differently Grown 3C-SiC Crystals and Heterostructures.