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Nanofabrication using focused ion and electron beams : principles and applications /
Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing t...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Oxford ; New York :
Oxford University Press,
2011.
|
| Colección: | Nanomanufacturing series ;
v. 1. |
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 245 | 0 | 0 | |a Nanofabrication using focused ion and electron beams : |b principles and applications / |c edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. |
| 260 | |a Oxford ; |a New York : |b Oxford University Press, |c 2011. | ||
| 300 | |a 1 online resource | ||
| 336 | |a text |b txt |2 rdacontent | ||
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| 490 | 1 | |a Nanomanufacturing series ; |v v. 1 | |
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment. | |
| 520 | |a Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr. | ||
| 546 | |a English. | ||
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Nanostructured materials. | |
| 650 | 0 | |a Nanotechnology. | |
| 650 | 0 | |a Electron beams |x Industrial applications. | |
| 650 | 0 | |a Ion bombardment |x Industrial applications. | |
| 650 | 6 | |a Nanomatériaux. | |
| 650 | 6 | |a Faisceaux électroniques |x Applications industrielles. | |
| 650 | 6 | |a Bombardement ionique |x Applications industrielles. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Material Science. |2 bisacsh | |
| 650 | 7 | |a Electron beams |x Industrial applications. |2 fast |0 (OCoLC)fst00906655 | |
| 650 | 7 | |a Ion bombardment |x Industrial applications. |2 fast |0 (OCoLC)fst00978570 | |
| 650 | 7 | |a Nanostructured materials. |2 fast |0 (OCoLC)fst01032630 | |
| 650 | 7 | |a Nanotechnology. |2 fast |0 (OCoLC)fst01032639 | |
| 650 | 2 | |a Nanostructures | |
| 700 | 1 | |a Utke, Ivo. | |
| 700 | 1 | |a Moshkalev, Stanislav. | |
| 700 | 1 | |a Russell, Phillip, |d 1955- | |
| 776 | 0 | 8 | |i Print version: |t Nanofabrication using focused ion and electron beams. |d Oxford ; New York : Oxford University Press, 2011 |z 9780199734214 |w (DLC) 2011028174 |w (OCoLC)707267321 |
| 830 | 0 | |a Nanomanufacturing series ; |v v. 1. | |
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