Scanning electron microscope optics and spectrometers /

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This book contains proposals to redesign the scanning electron microscope so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning ele...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Khursheed, Anjam
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Singapore ; London : World Scientific, ©2011.
Temas:
Scanning electron microscopes > Design and construction.
Spectrometer > Design and construction.
TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades.
Spectrometer > Design and construction
Acceso en línea:Texto completo
Tabla de Contenidos:
  • 1. Conventional SEM design. 1.1. Introduction to the SEM. 1.2. Basic principles of electron optics. 1.3. The electron gun. 1.4. Lens aberrations and primary beam probe size. 1.5. Deflection systems. 1.6. Quadrupole stigmators. 1.7. SEM output signals. 1.8. The emission hemisphere and BSE collection. 1.9. The scattered electron energy distribution. 1.10. The SE collection efficiency. 1.11. Specimen charging. 1.12. Elastic BSE imaging. 1.13. Selected SEM image examples
  • 2. Spectrometer design principles. 2.1. Figures of merit. 2.2. The SAM and the SEM. 2.3. The retarding field analyzer. 2.4. Deflection field analyzers
  • 3. In-lens improvements. 3.1. Magnetic immersion lenses. 3.2. Magnetic semi-in-lens designs. 3.3. Electric retarding field lenses. 3.4. Mixed field in-lens designs. 3.5. Selected in-lens image examples
  • 4. Sub-nanometer probe diameters. 4.1. Monochromators and immersion objective lenses. 4.2. Aberration correctors. 4.3. The helium ion microscope
  • 5. Secondary electron spectrometers. 5.1. Early deflection analyzers. 5.2. Retarding field analyzers. 5.3. Surface fields and signal-to-noise characteristics. 5.4. Deflection/multi-channel analyzers
  • 6. Full range deflector spectrometer designs. 6.1. First-order focusing toroidal analyzers. 6.2. A second-order focusing toroidal analyzer design. 6.3. A modified fountain analyzer design
  • 7. Full range parallel energy spectrometer designs. 7.1. The time-of-flight spectrometer. 7.2. A Gaussian field magnetic sector. 7.3. A round magnetic beam separator
  • 8. Spectroscopic SEM proposals.

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