Handbook of silicon based MEMS materials and technologies /

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Lindroos, Veikko
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Edición:1st ed.
Colección:Micro & nano technologies.
Temas:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques.
Microsystèmes électromécaniques > Matériaux.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Microelectromechanical systems
Microelectromechanical systems > Materials
Silicon > Electric properties
MEMS
Silicium
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index.

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