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Handbook of silicon based MEMS materials and technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010.
|
| Edición: | 1st ed. |
| Colección: | Micro & nano technologies.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | EBSCO_ocn667288128 | ||
| 003 | OCoLC | ||
| 005 | 20231017213018.0 | ||
| 006 | m o d | ||
| 007 | cr cnu---unuuu | ||
| 008 | 100930s2010 ne a ob 001 0 eng d | ||
| 040 | |a N$T |b eng |e pn |c N$T |d YDXCP |d EBLCP |d IDEBK |d E7B |d OCLCQ |d COO |d OCLCQ |d MERUC |d OCLCQ |d DEBSZ |d OCLCQ |d HS0 |d OCLCF |d OPELS |d OCLCQ |d S3O |d OCLCQ |d D6H |d VT2 |d ICA |d COCUF |d LOA |d K6U |d STF |d PIFAG |d FVL |d ZCU |d OTZ |d UAB |d OCLCQ |d OCLCO |d U3W |d OCLCA |d WRM |d OCLCO |d VTS |d ICG |d INT |d OCLCQ |d DKC |d OCLCQ |d S9I |d ERF |d OCLCQ |d LUN |d EYM |d OCLCQ |d OCLCO |d OCLCQ |d OCLCO | ||
| 019 | |a 610562694 |a 647909897 |a 649817920 |a 712988339 |a 811598100 |a 920467914 |a 961885315 |a 972503659 |a 984803122 |a 988655402 |a 992094701 |a 994930931 |a 999510024 |a 1037925819 |a 1038674718 |a 1055380280 |a 1064159350 |a 1081275219 |a 1103277091 |a 1129336813 | ||
| 020 | |a 9780080947723 |q (electronic bk.) | ||
| 020 | |a 0080947727 |q (electronic bk.) | ||
| 020 | |z 9780815515944 |q (hbk.) | ||
| 020 | |z 0815515944 |q (hbk.) | ||
| 024 | 8 | |a 9786612541148 | |
| 029 | 1 | |a AU@ |b 000055744071 | |
| 029 | 1 | |a DEBBG |b BV043959802 | |
| 029 | 1 | |a DEBBG |b BV044143693 | |
| 029 | 1 | |a DEBSZ |b 372707386 | |
| 029 | 1 | |a DEBSZ |b 481266216 | |
| 035 | |a (OCoLC)667288128 |z (OCoLC)610562694 |z (OCoLC)647909897 |z (OCoLC)649817920 |z (OCoLC)712988339 |z (OCoLC)811598100 |z (OCoLC)920467914 |z (OCoLC)961885315 |z (OCoLC)972503659 |z (OCoLC)984803122 |z (OCoLC)988655402 |z (OCoLC)992094701 |z (OCoLC)994930931 |z (OCoLC)999510024 |z (OCoLC)1037925819 |z (OCoLC)1038674718 |z (OCoLC)1055380280 |z (OCoLC)1064159350 |z (OCoLC)1081275219 |z (OCoLC)1103277091 |z (OCoLC)1129336813 | ||
| 037 | |a 254114 |b MIL | ||
| 050 | 4 | |a TK7875 |b .H36 2010eb | |
| 072 | 7 | |a TEC |x 008100 |2 bisacsh | |
| 072 | 7 | |a TEC |x 008090 |2 bisacsh | |
| 082 | 0 | 4 | |a 621.38152 |2 22 |
| 084 | |a ZN 3750 |2 rvk | ||
| 049 | |a UAMI | ||
| 245 | 0 | 0 | |a Handbook of silicon based MEMS materials and technologies / |c Veikko Lindroos [and others]. |
| 250 | |a 1st ed. | ||
| 260 | |a Amsterdam ; |a Boston : |b William Andrew/Elsevier, |c 2010. | ||
| 300 | |a 1 online resource (xxxii, 636 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Micro & nano technologies | |
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index. | |
| 520 | |a A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo. | ||
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectromechanical systems |x Materials. | |
| 650 | 0 | |a Silicon |x Electric properties. | |
| 650 | 2 | |a Micro-Electrical-Mechanical Systems | |
| 650 | 6 | |a Microsystèmes électromécaniques. | |
| 650 | 6 | |a Microsystèmes électromécaniques |x Matériaux. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Solid State. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Semiconductors. |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems |2 fast | |
| 650 | 7 | |a Microelectromechanical systems |x Materials |2 fast | |
| 650 | 7 | |a Silicon |x Electric properties |2 fast | |
| 650 | 7 | |a MEMS |2 gnd | |
| 650 | 7 | |a Silicium |2 gnd | |
| 700 | 1 | |a Lindroos, Veikko. | |
| 776 | 0 | 8 | |i Print version: |t Handbook of silicon based MEMS materials and technologies. |b 1st ed. |d Amsterdam ; Boston : William Andrew/Elsevier, 2010 |z 9780815515944 |w (OCoLC)428777214 |
| 830 | 0 | |a Micro & nano technologies. | |
| 856 | 4 | 0 | |u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=335110 |z Texto completo |
| 938 | |a EBL - Ebook Library |b EBLB |n EBL534865 | ||
| 938 | |a ebrary |b EBRY |n ebr10378866 | ||
| 938 | |a EBSCOhost |b EBSC |n 335110 | ||
| 938 | |a YBP Library Services |b YANK |n 3231279 | ||
| 938 | |a YBP Library Services |b YANK |n 3271072 | ||
| 994 | |a 92 |b IZTAP | ||