Handbook of silicon based MEMS materials and technologies /

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Lindroos, Veikko
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Edición:1st ed.
Colección:Micro & nano technologies.
Temas:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques.
Microsystèmes électromécaniques > Matériaux.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Microelectromechanical systems
Microelectromechanical systems > Materials
Silicon > Electric properties
MEMS
Silicium
Acceso en línea:Texto completo
Descripción
Sumario:A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo.
Descripción Física:1 online resource (xxxii, 636 pages) : illustrations
Bibliografía:Includes bibliographical references and index.
ISBN:9780080947723
0080947727

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