Acoustic wave and electromechanical resonators : concept to key applications /

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This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the te...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Campanella, Humberto
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Norwood, MA. : Artech House, ©2010.
Colección:Artech House integrated microsystems series.
Temas:
Acoustic surface wave devices.
Electric resonators.
Dispositifs à ondes acoustiques de surface.
Résonateurs électriques.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Acoustic surface wave devices
Electric resonators
Acceso en línea:Texto completo
Tabla de Contenidos:
  • 1. MEMs and NEMs resonator technologies
  • 2. Acoustic microresonator technologies
  • 3. Design and modeling of micro- and nanoresonators
  • 4. Fabrication techniques
  • 5. Characterization techniques
  • 6. Performance optimization
  • 7. Integration of resonator to CMOS technologies
  • 8. Sensor applications
  • 9. Radio frequency applications
  • 10. Case studies.

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