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Acoustic wave and electromechanical resonators : concept to key applications /
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the te...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwood, MA. :
Artech House,
©2010.
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| Colección: | Artech House integrated microsystems series.
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| Temas: | |
| Acceso en línea: | Texto completo |