Acoustic wave and electromechanical resonators : concept to key applications /

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This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the te...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Campanella, Humberto
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Norwood, MA. : Artech House, ©2010.
Colección:Artech House integrated microsystems series.
Temas:
Acoustic surface wave devices.
Electric resonators.
Dispositifs à ondes acoustiques de surface.
Résonateurs électriques.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Acoustic surface wave devices
Electric resonators
Acceso en línea:Texto completo
Descripción
Sumario:This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.
Descripción Física:1 online resource (xv, 345 pages) : illustrations
Bibliografía:Includes bibliographical references and index.
ISBN:9781607839781
1607839784
9781607839774
1607839776

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