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|a Microelectronic failure analysis :
|b desk reference : 2001 supplement /
|c prepared under the direction of the Electronic Device Failure Analysis Society Publications Committee.
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|a Materials Park, OH :
|b ASM International,
|c ©2001.
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|b [Place of publication not identified] :
|c HathiTrust Digital Library,
|d 2010.
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|a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
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|a Preface -- Contents -- Focused Ion Beam Backside Isolation Techniques -- Package/Sample Cross Sectioning -- Copper Deprocessing -- Atomic Force Microscopy, Scanning Probe Microscopy, and Scanning Capacitance Microscopy -- Supplementary Information
|
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|a Microelectronics
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650 |
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