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Silicon carbide micro electromechanical systems for harsh environments /
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality u...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
London :
Imperial College Press,
©2006.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 245 | 0 | 0 | |a Silicon carbide micro electromechanical systems for harsh environments / |c editor Rebecca Cheung. |
| 246 | 3 | |a Silicon carbide microelectromechanical systems for harsh environments | |
| 260 | |a London : |b Imperial College Press, |c ©2006. | ||
| 300 | |a 1 online resource (x, 181 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Ch. 1. Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) / Rebecca Cheung -- ch. 2. Deposition techniques for SiC MEMS / Christian A. Zorman, Xiao-An Fu and Mehran Mehregany -- ch. 3. Review of issues pertaining to the development of contacts to silicon carbide: 1996-2002 / Lisa M. Porter and Feroz A. Mohammad -- ch. 4. Dry etching of SiC / S.J. Pearton -- ch. 5. Design, performance and applications of SiC MEMS / Stefan Zappe. | |
| 520 | |a This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for application. | ||
| 546 | |a English. | ||
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Silicon carbide. | |
| 650 | 2 | |a Micro-Electrical-Mechanical Systems | |
| 650 | 6 | |a Microsystèmes électromécaniques. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Microelectronics. |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Electronics |x Digital. |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems. |2 fast |0 (OCoLC)fst01019745 | |
| 650 | 7 | |a Silicon carbide. |2 fast |0 (OCoLC)fst01118657 | |
| 700 | 1 | |a Cheung, Rebecca. | |
| 776 | 0 | 8 | |i Print version: |t Silicon carbide microelectromechanical systems for harsh environments. |d London : Imperial College Press, ©2006 |z 1860946240 |z 9781860946240 |w (DLC) 2006284107 |w (OCoLC)71346498 |
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