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Silicon carbide micro electromechanical systems for harsh environments /
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality u...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
London :
Imperial College Press,
©2006.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for application. |
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| Descripción Física: | 1 online resource (x, 181 pages) : illustrations |
| Bibliografía: | Includes bibliographical references. |
| ISBN: | 1860949096 9781860949098 1281347566 9781281347565 9786611347567 6611347569 |