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Plasma deposition of amorphous silicon-based materials /

Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Bruno, Giovanni, Capezzuto, Pio, Madan, A. (Arun)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, ©1995.
Colección:Plasma--materials interactions.
Temas:
Acceso en línea:Texto completo

MARC

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245 0 0 |a Plasma deposition of amorphous silicon-based materials /  |c edited by Giovanni Bruno, Pio Capezzuto, Arun Madan. 
260 |a Boston :  |b Academic Press,  |c ©1995. 
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490 1 |a Plasma--materials interactions 
504 |a Includes bibliographical references and index. 
588 0 |a Print version record. 
505 0 |a Front Cover; Plasma Deposition of Amorphous Silicon-Based Materials; Copyright Page; Contents; Contributors; Preface; Chapter 1. Chemistry of Amorphous Silicon Deposition Processes: Fundamentals and Controversial Aspects; Chapter 2. Diagnostics of Amorphous Silicon (a-Si) Plasma Processes; Chapter 3. Deposition Conditions and the Optoelectronic Properties of a-Si:H Alloys; Chapter 4. Reactor Design for a-Si:H Deposition; Chapter 5. Optoelectronic Properties of Amorphous Silicon Using the Plasma- Enhanced Chemical Vapor Deposition (PECVD) Technique; Chapter 6. Amorphous-Silicon-Based Devices. 
520 |a Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. 
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650 0 |a Silicon alloys. 
650 0 |a Plasma-enhanced chemical vapor deposition. 
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650 6 |a Dépôt chimique en phase vapeur activé par plasma. 
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650 7 |a TECHNOLOGY & ENGINEERING  |x Electronics  |x Semiconductors.  |2 bisacsh 
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650 7 |a Silicon alloys.  |2 fast  |0 (OCoLC)fst01118655 
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700 1 |a Bruno, Giovanni. 
700 1 |a Capezzuto, Pio. 
700 1 |a Madan, A.  |q (Arun) 
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