Plasma processing and processing science /

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores Corporativos: National Research Council (U.S.). Panel on Plasma Processing, National Research Council (U.S.). Naval Studies Board, National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications
Otros Autores: Chen, Francis F., 1929-
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Washington, D.C. : National Academy Press, 1995.
Colección:NRL strategic series.
Temas:
Plasma engineering.
Semiconductors > Etching.
Plasma etching.
Technique des plasmas.
Semi-conducteurs > Attaque chimique.
Gravure par plasma.
TECHNOLOGY & ENGINEERING > Mechanical.
Plasma engineering
Plasma etching
Semiconductors > Etching
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Plasma Processing and Processing Science
  • Copyright
  • Preface
  • Contents
  • Chapter 1 Introduction and Summary
  • Chapter 2 Modeling and Simulation of Plasma Processing
  • RESEARCH OPPORTUNITIES
  • Requirements of the Microelectronics Fabrication Industry
  • Multidimensional Models
  • Plasma Chemistry
  • Surface Chemistry
  • Electromagnetics
  • Current Status of Modeling and Simulation
  • Particle-in-Cell Simulations
  • Kinetic Models
  • Fluid or Hydrodynamic Models
  • Hybrid Models
  • A ROLE FOR NRL
  • Chapter 3 Semiconductor Processing
  • RESEARCH OPPORTUNITIESA ROLE FOR NRL
  • Development and Characterization of Precompetitive Materials and Processes
  • Comparative Analysis and Characterization of Tools and Processes in Development
  • Sensor Development for Control and Fingerprinting of Manufacturing Processes
  • Chapter 4 Plasma Deposition and Polymerization
  • RESEARCH OPPORTUNITIES
  • Semiconductor Fabrication
  • Barrier Coatings
  • Fibrous Materials
  • Optical Coatings and Photonics
  • Plasma Polymerization
  • A ROLE FOR NRL
  • Chapter 5 Ion Implantation and Surface Modification
  • RESEARCH OPPORTUNITIESIntroduction
  • Plasma and Ion Beam Implantation Technology
  • Ion Beam Implantation
  • Plasma Source Ion Implantation
  • Applications
  • Implantation of Metals
  • Implantation of Nonmetals
  • A ROLE FOR NRL
  • Chapter 6 Thermal Plasmas
  • RESEARCH OPPORTUNITIES
  • Introduction
  • Plasma Spraying
  • Plasma Chemical Vapor Deposition
  • Plasma Waste Destruction
  • Plasma Metallurgy
  • Thermal Plasma Synthesis
  • Plasma Consolidation
  • A ROLE FOR NRL
  • Thermal Plasma Waste Destruction
  • Plasma Chemical Vapor Deposition
  • Diamond FilmsCubic Boron Nitride Films
  • Carbon Nitride
  • Chapter 7 Flat Panel Displays
  • RESEARCH OPPORTUNITIES
  • Introduction
  • Passive Matrix Liquid Crystal Display
  • Active Matrix Liquid Crystal Display
  • Amorphous Silicon
  • Polycrystalline Silicon
  • Transfer Silicon
  • Thin Film Electroluminescent Displays
  • Digital Micromirror Devices
  • Plasma Displays
  • Field Emission Displays
  • A ROLE FOR NRL
  • Chapter 8 Low-Temperature Plasma Physics
  • RESEARCH OPPORTUNITIES
  • A ROLE FOR NRL
  • Chapter 9 Conclusions and Recommendations

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