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|a UAMI
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| 245 |
0 |
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|a Plasma processing and processing science /
|c Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
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| 260 |
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|a Washington, D.C. :
|b National Academy Press,
|c 1995.
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| 300 |
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|a 1 online resource (x, 35 pages)
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
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1 |
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|a NRL strategic series
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| 500 |
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|a Committee chair: Francis F. Chen.
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| 500 |
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|a This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
|
| 588 |
0 |
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|a Print version record.
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0 |
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|a Plasma Processing and Processing Science -- Copyright -- Preface -- Contents -- Chapter 1 Introduction and Summary -- Chapter 2 Modeling and Simulation of Plasma Processing -- RESEARCH OPPORTUNITIES -- Requirements of the Microelectronics Fabrication Industry -- Multidimensional Models -- Plasma Chemistry -- Surface Chemistry -- Electromagnetics -- Current Status of Modeling and Simulation -- Particle-in-Cell Simulations -- Kinetic Models -- Fluid or Hydrodynamic Models -- Hybrid Models -- A ROLE FOR NRL -- Chapter 3 Semiconductor Processing
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| 505 |
8 |
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|a RESEARCH OPPORTUNITIESA ROLE FOR NRL -- Development and Characterization of Precompetitive Materials and Processes -- Comparative Analysis and Characterization of Tools and Processes in Development -- Sensor Development for Control and Fingerprinting of Manufacturing Processes -- Chapter 4 Plasma Deposition and Polymerization -- RESEARCH OPPORTUNITIES -- Semiconductor Fabrication -- Barrier Coatings -- Fibrous Materials -- Optical Coatings and Photonics -- Plasma Polymerization -- A ROLE FOR NRL -- Chapter 5 Ion Implantation and Surface Modification
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| 505 |
8 |
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|a RESEARCH OPPORTUNITIESIntroduction -- Plasma and Ion Beam Implantation Technology -- Ion Beam Implantation -- Plasma Source Ion Implantation -- Applications -- Implantation of Metals -- Implantation of Nonmetals -- A ROLE FOR NRL -- Chapter 6 Thermal Plasmas -- RESEARCH OPPORTUNITIES -- Introduction -- Plasma Spraying -- Plasma Chemical Vapor Deposition -- Plasma Waste Destruction -- Plasma Metallurgy -- Thermal Plasma Synthesis -- Plasma Consolidation -- A ROLE FOR NRL -- Thermal Plasma Waste Destruction -- Plasma Chemical Vapor Deposition
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| 505 |
8 |
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|a Diamond FilmsCubic Boron Nitride Films -- Carbon Nitride -- Chapter 7 Flat Panel Displays -- RESEARCH OPPORTUNITIES -- Introduction -- Passive Matrix Liquid Crystal Display -- Active Matrix Liquid Crystal Display -- Amorphous Silicon -- Polycrystalline Silicon -- Transfer Silicon -- Thin Film Electroluminescent Displays -- Digital Micromirror Devices -- Plasma Displays -- Field Emission Displays -- A ROLE FOR NRL -- Chapter 8 Low-Temperature Plasma Physics -- RESEARCH OPPORTUNITIES -- A ROLE FOR NRL -- Chapter 9 Conclusions and Recommendations
|
| 546 |
|
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|a English.
|
| 590 |
|
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|a eBooks on EBSCOhost
|b EBSCO eBook Subscription Academic Collection - Worldwide
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| 650 |
|
0 |
|a Plasma engineering.
|
| 650 |
|
0 |
|a Semiconductors
|x Etching.
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| 650 |
|
0 |
|a Plasma etching.
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| 650 |
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6 |
|a Technique des plasmas.
|
| 650 |
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6 |
|a Semi-conducteurs
|x Attaque chimique.
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| 650 |
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6 |
|a Gravure par plasma.
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| 650 |
|
7 |
|a TECHNOLOGY & ENGINEERING
|x Mechanical.
|2 bisacsh
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| 650 |
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7 |
|a Plasma engineering
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| 650 |
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7 |
|a Plasma etching
|2 fast
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| 650 |
|
7 |
|a Semiconductors
|x Etching
|2 fast
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| 700 |
1 |
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|a Chen, Francis F.,
|d 1929-
|
| 710 |
2 |
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|a National Research Council (U.S.).
|b Panel on Plasma Processing.
|
| 710 |
2 |
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|a National Research Council (U.S.).
|b Naval Studies Board.
|
| 710 |
2 |
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|a National Research Council (U.S.).
|b Commission on Physical Sciences, Mathematics, and Applications.
|
| 776 |
0 |
8 |
|i Print version:
|t Plasma processing and processing science.
|d Washington, D.C. : National Academy Press, 1995
|w (OCoLC)32785090
|
| 830 |
|
0 |
|a NRL strategic series.
|
| 856 |
4 |
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