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|a MEMS mechanical sensors /
|c Stephen Beeby [and others].
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|a Boston :
|b Artech House,
|c ©2004.
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|a 1 online resource (x, 269 pages) :
|b illustrations
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|a Artech House microelectromechanical systems (MEMS) series
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|a Includes bibliographical references and index.
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|a Print version record.
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520 |
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|a Annotation
|b Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
|
505 |
0 |
0 |
|g Machine generated contents note:
|g Ch. 1
|t Introduction --
|g Ch. 2
|t Materials and fabrication techniques --
|g Ch. 3
|t MEMS simulation and design tools --
|g Ch. 4
|t Mechanical sensor packaging --
|g Ch. 5
|t Mechanical transduction techniques --
|g Ch. 6
|t Pressure sensors --
|g Ch. 7
|t Force and torque sensors --
|g Ch. 8
|t Inertial sensors --
|g Ch. 9
|t Flow sensors.
|
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|a eBooks on EBSCOhost
|b EBSCO eBook Subscription Academic Collection - Worldwide
|
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|
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|a Microelectromechanical systems.
|
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|
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|a Detectors.
|
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|
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|a Microsystèmes électromécaniques.
|
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|
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|a TECHNOLOGY & ENGINEERING
|x Sensors.
|2 bisacsh
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|a Detectors.
|2 cct
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|a Microelectromechanical systems.
|2 cct
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|a Beeby, Stephen.
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|i Print version:
|t MEMS mechanical sensors.
|d Boston : Artech House, ©2004
|z 1580535364
|w (DLC) 2004046158
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|a Microelectromechanical systems series.
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