Microelectromechanical systems : advanced materials and fabrication methods /

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores Corporativos: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Research Council (U.S.). National Materials Advisory Board, National Research Council (U.S.). Commission on Engineering and Technical Systems
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Washington, DC : National Academy Press, 1997.
Temas:
Microelectronics > Materials.
Microelectromechanical systems > Design and construction.
Microélectronique > Matériaux.
Microsystèmes électromécaniques > Conception et construction.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Microelectromechanical systems > Design and construction
Microelectronics > Materials
Andre fag (naturvidenskab og teknik) > Andre fag
Acceso en línea:Texto completo
Descripción
Descripción Física:1 online resource (xiv, 61 pages) : illustrations
Bibliografía:Includes bibliographical references (pages 51-55).
ISBN:0309059801
9780309059800
0585002509
9780585002507
9786610187096
6610187096

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