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Understanding smart sensors /

Here is a complete, authoritative summary of the latest applications and developments impacting smart sensors in a single volume, now updated to reflect IEEE 1451.2 smart sensor standards. Utilizing the latest in smart sensor, microelectromechanical systems (MEMS) and microelectronic research and de...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Frank, Randy
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Artech House, 2000.
Edición:2nd ed.
Colección:Artech House sensors library.
Temas:
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Smart Sensor Basics
  • Mechanical-Electronic Transitions in Sensing
  • Nature of Sensors
  • Integration of Micromachining and Microelectronics
  • Micromachining
  • Bulk Micromachining
  • Wafer Bonding
  • Silicon-on-Silicon Bonding
  • Silicon-on-Glass (Anodic) Bonding
  • Silicon Fusion Bonding
  • Wafer Bonding for More Complex Structures and Adding ICs
  • Surface Micromachining
  • Squeeze-Film Damping
  • Stiction
  • Particulate Control
  • Combinations of Surface and Bulk Micromachining
  • Other Micromachining Techniques
  • LIGA Process
  • Dry-Etching Processes
  • Micromilling
  • Lasers in Micromachining
  • Chemical Etching and IC Technology
  • Other Micromachined Materials
  • Diamond as an Alternative Sensor Material
  • Metal Oxides and Piezoelectric Sensing
  • Films on Microstructures
  • Micromachining Metal Structures
  • The Nature of Semiconductor Sensor Output
  • Sensor Output Characteristics
  • Wheatstone Bridge
  • Piezoresistivity in Silicon
  • Semiconductor Sensor Definitions
  • Static Versus Dynamic Operation
  • Other Sensing Technologies
  • Capacitive Sensing
  • Piezoelectric Sensing
  • Hall Effect
  • Chemical Sensors
  • Improving Sensor Characteristics
  • Digital Output Sensors
  • Incremental Optical Encoders
  • Digital Techniques
  • Noise/Interference Aspects
  • Low-Power, Low-Voltage Sensors
  • Impedance
  • Analysis of Sensitivity Improvement
  • Thin Diaphragm
  • Increased Diaphragm Area
  • Combined Solution: Micromachining and Microelectronics
  • Getting Sensor Information Into the MCU
  • Amplification and Signal Conditioning
  • Instrumentation Amplifiers
  • SLEEPMODE Operational Amplifier
  • Rail-to-Rail Operational Simplifiers
  • Switched-Capacitor Amplifier
  • Barometer Application Circuit
  • 4- to 20-mA Signal Transmitter
  • Schmitt Trigger
  • Inherent Power-Supply Rejection
  • Separate Versus Integrated Signal Conditioning
  • Integrated Passive Elements
  • Integrated Active Elements
  • Digital Conversion
  • A/D Converters
  • Performance of A/D Converters
  • Implications of A/D Accuracy and Errors
  • Using MCUs/DSPs to Increase Sensor IQ
  • Other IC Technologies
  • Logic Requirements
  • MCU Control
  • MCUs for Sensor Interface
  • Peripherals
  • Memory
  • Input/Output
  • Onboard A/D Conversion
  • Power-Saving Capability
  • Local Voltage or Current Regulation
  • Modular MCU Design
  • DSP Control
  • Algorithms Versus Lookup Tables
  • Techniques and Systems Considerations
  • Linearization
  • PWM Control
  • Autozero and Autorange
  • Diagnostics
  • Reducing Electromagnetic Compatibility and Radio Frequency Interference
  • Indirect (Computed, Not Sensed) Versus Direct Sensing
  • Software, Tools, and Support
  • Sensor Integration
  • Communications for Smart Sensors
  • Definitions and Background
  • Sources (Organizations) and Standards
  • Automotive Protocols
  • SAE J1850
  • CAN Protocol
  • Other Automotive Protocols
  • Industrial Networks
  • Industrial Usage of CAN
  • LonTalk Protocol
  • Other Industrial Protocols
  • Office/Building Automation
  • Home Automation
  • CEBus
  • LonTalk
  • Protocols in Silicon
  • MCU With Integrated SAE J1850
  • MCU With Integrated CAN
  • Neuron Chips and LonTalk Protocol
  • MI-Bus
  • Other MCUs and Protocols
  • Other Aspects of Network Communications
  • MCU Protocols
  • Transition Between Protocols
  • Transition Between Systems
  • The Protocol as a Module
  • Control Techniques
  • Programmable Logic Controllers
  • Open- Versus Closed-Loop Systems
  • PID Control
  • State Machines
  • Fuzzy Logic
  • Neural Networks
  • Combined Fuzzy Logic and Neural Networks
  • Adaptive Control
  • Observers for Sensing
  • Other Control Areas
  • RISC Versus CISC
  • Combined CISC, RISC, and DSP
  • The Impact of Artificial Intelligence
  • Transceivers, Transponders, and Telemetry
  • The RF Spectrum
  • Spread Spectrum
  • Wireless Data and Communications
  • Wireless Local Area Networks
  • FAX/Modems
  • Wireless Zone Sensing
  • Optical Signal Transmission
  • RF Sensing
  • Surface Acoustical Wave Devices
  • Radar
  • Global Positioning System
  • Remote Emissions Sensing
  • Remote Keyless Entry
  • Intelligent Transportation System
  • RF-ID
  • Other Remote Sensing
  • Measuring RF Signal Strength
  • Telemetry
  • RF MEMS
  • MEMS Beyond Sensors
  • Micromachined Actuators
  • Microvalves
  • Micromotors
  • Micropumps
  • Microdynamometers
  • Microsteam Engines
  • Actuators in Other Semiconductor Materials
  • Other Micromachined Structures
  • Cooling Channels
  • Microoptics
  • Microgrippers
  • Microprobes
  • Micromirrors
  • Heating Elements
  • Thermionic Emitters
  • Field Emission Displays
  • Unfoldable Microelements
  • Micronozzles
  • Interconnects for Stacked Wafers
  • Nanoguitar
  • Packaging, Testing, and Reliability Implications of Smarter Sensors
  • Semiconductor Packaging Applied to Sensors
  • Increased Pin Count
  • Hybrid Packaging
  • Ceramic Packaging and Ceramic Substrates
  • Multichip Modules
  • Dual-Chip Packaging
  • Ball Grid Array Packaging
  • Packaging for Monolithic Sensors
  • Plastic Packaging
  • Surface-Mount Packaging
  • Flip-Chip
  • Wafer-Level Packaging
  • Reliability Implications
  • The Physics of Failure
  • Wafer-Level Sensor Reliability
  • Testing Smarter Sensors
  • Mechatronics and Sensing Systems
  • Integration and Mechatronics
  • Smart-Power ICs
  • Embedded Sensing
  • Temperature Sensing
  • Current Sensing in Power ICs
  • Diagnostics
  • MEMS Relays
  • Sensing Arrays
  • Multiple Sensing Devices
  • Multiple Types of Sensors
  • An Integrated Sensing System
  • Other System Aspects
  • Batteries
  • Field Emission Displays
  • System Voltage Transients, Electrostatic Discharge, and Electromagnetic Interference
  • Standards for Smart Sensing
  • Setting the Standards for Smart Sensors and Systems
  • IEEE 1451.1
  • Network-Capable Application Processor
  • Network Communication Models
  • The IEEE 1451.1 Example
  • IEEE 1451.2
  • STIM
  • Transducer Electronic Data Sheet
  • TII
  • Calibration/Correction Engine
  • Sourcing Power to STIMs
  • Representing Physical Units in the TEDS
  • IEEE P1451.3
  • IEEE P1451.4
  • Extending the System to the Network
  • The Implications of Smart Sensor Standards
  • Sensor Plug-and-Play
  • Communicating Sensor Data Via Existing Wiring
  • Ethernet
  • Sensing by Modem
  • Automated/Remote Sensing and the Web
  • Wireless Protocol
  • Remote Diagnosis
  • Process Control Over the Internet
  • Alternative Standards
  • Airplane Networks
  • Automotive Safety Network
  • The Next Phase of Sensing Systems
  • Future Semiconductor Capabilities
  • Future System Requirements
  • Not-So-Futuristic Systems
  • Fabry-Perot Interferometer
  • HVAC Sensor Chip
  • Speech Recognition and Micromicrophones
  • Electrostatic Mesocooler
  • Microangular Rate Sensors
  • MCU With Integrated Pressure Sensor
  • Wireless Sensing in the Networked Vehicle
  • Personal ID Smart Sensor
  • Software, Sensing, and the System
  • CAD for MEMS
  • Alternative Views of Smart Sensing
  • The Smart Loop.