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Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor Corporativo:	National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Washington, D.C. : National Academy Press, 1992.
Temas:	Microelectronics industry. Molecular beams > Industrial applications. Microelectronics > Materials. Plasma-enhanced chemical vapor deposition > Industrial applications. Microélectronique > Industrie. Faisceaux moléculaires > Applications industrielles. Microélectronique > Matériaux. Dépôt chimique en phase vapeur activé par plasma > Applications industrielles. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Electronics > Digital. Microelectronics industry Microelectronics > Materials Molecular beams > Industrial applications Plasma-enhanced chemical vapor deposition > Industrial applications Molecular > Industrial applications Plasma-enhanced > Industrial applications
Acceso en línea:	Texto completo

MARC


LEADER	00000cam a2200000Ma 4500
001	EBSCO_ocm44965115
003	OCoLC
005	20231017213018.0
006	m o d
007	cr cn\|\|\|\|\|\|\|\|\|
008	000807s1992 dcua ob 000 0 eng d
010			\|a 92060205
040			\|a N$T \|b eng \|e pn \|c N$T \|d OCL \|d OCLCQ \|d YDXCP \|d OCLCQ \|d NTE \|d OCLCQ \|d TUU \|d OCLCQ \|d TNF \|d OCLCQ \|d OCLCO \|d REDDC \|d DKDLA \|d ADU \|d E7B \|d OCLCE \|d IDEBK \|d ORU \|d FVL \|d OCLCQ \|d OCLCF \|d AU@ \|d OCLCQ \|d NLGGC \|d DEBSZ \|d OCLCQ \|d UV0 \|d OCLCQ \|d AZK \|d OCLCQ \|d MWM \|d COCUF \|d AGLDB \|d MOR \|d PIFBR \|d OCLCQ \|d U3W \|d LUE \|d STF \|d WRM \|d OCLCQ \|d VTS \|d NRAMU \|d EZ9 \|d INT \|d VT2 \|d OCLCQ \|d WYU \|d JZ6 \|d UKAHL \|d UKCRE \|d OCLCO \|d OCLCQ \|d CNNOR \|d INARC \|d OCLCO
019			\|a 70743345 \|a 475710844 \|a 614627301 \|a 645001351 \|a 645848117 \|a 647354688 \|a 666937055 \|a 722243284 \|a 728013678 \|a 842268299 \|a 961556402 \|a 961692112 \|a 962567977 \|a 962582153 \|a 970741664 \|a 975242809 \|a 975290924 \|a 988435825 \|a 992056726 \|a 1016979650 \|a 1018038089 \|a 1037921757 \|a 1038188587 \|a 1038689873 \|a 1044655836 \|a 1045385927 \|a 1045399854 \|a 1045511394 \|a 1047526758 \|a 1047941013 \|a 1053007470 \|a 1055341078 \|a 1058761552 \|a 1064103423 \|a 1065797638 \|a 1081206680 \|a 1085940678 \|a 1100578172 \|a 1153516060 \|a 1156344009 \|a 1157954437 \|a 1178725056 \|a 1183978967 \|a 1228556174 \|a 1249171475 \|a 1249230351 \|a 1257342179 \|a 1257381327 \|a 1391176400
020			\|a 0585149453 \|q (electronic bk.)
020			\|a 9780585149455 \|q (electronic bk.)
020			\|z 0309046351
020			\|z 9780309046350 \|q (print)
029	1		\|a AU@ \|b 000050895136
029	1		\|a AU@ \|b 000051596346
029	1		\|a DEBBG \|b BV043061822
029	1		\|a DEBSZ \|b 422560960
029	1		\|a GBVCP \|b 800659287
029	1		\|a NZ1 \|b 11927460
029	1		\|a NZ1 \|b 16094550
029	1		\|a DKDLA \|b 820120-katalog:999927316505765
035			\|a (OCoLC)44965115 \|z (OCoLC)70743345 \|z (OCoLC)475710844 \|z (OCoLC)614627301 \|z (OCoLC)645001351 \|z (OCoLC)645848117 \|z (OCoLC)647354688 \|z (OCoLC)666937055 \|z (OCoLC)722243284 \|z (OCoLC)728013678 \|z (OCoLC)842268299 \|z (OCoLC)961556402 \|z (OCoLC)961692112 \|z (OCoLC)962567977 \|z (OCoLC)962582153 \|z (OCoLC)970741664 \|z (OCoLC)975242809 \|z (OCoLC)975290924 \|z (OCoLC)988435825 \|z (OCoLC)992056726 \|z (OCoLC)1016979650 \|z (OCoLC)1018038089 \|z (OCoLC)1037921757 \|z (OCoLC)1038188587 \|z (OCoLC)1038689873 \|z (OCoLC)1044655836 \|z (OCoLC)1045385927 \|z (OCoLC)1045399854 \|z (OCoLC)1045511394 \|z (OCoLC)1047526758 \|z (OCoLC)1047941013 \|z (OCoLC)1053007470 \|z (OCoLC)1055341078 \|z (OCoLC)1058761552 \|z (OCoLC)1064103423 \|z (OCoLC)1065797638 \|z (OCoLC)1081206680 \|z (OCoLC)1085940678 \|z (OCoLC)1100578172 \|z (OCoLC)1153516060 \|z (OCoLC)1156344009 \|z (OCoLC)1157954437 \|z (OCoLC)1178725056 \|z (OCoLC)1183978967 \|z (OCoLC)1228556174 \|z (OCoLC)1249171475 \|z (OCoLC)1249230351 \|z (OCoLC)1257342179 \|z (OCoLC)1257381327 \|z (OCoLC)1391176400
042			\|a dlr
050		4	\|a TK7836 \|b .N37 1992eb
072		7	\|a TEC \|x 008070 \|2 bisacsh
072		7	\|a TEC \|x 008060 \|2 bisacsh
082	0	4	\|a 621.381 \|2 20
088			\|a NMAB 461
049			\|a UAMI
110	2		\|a National Research Council (U.S.). \|b Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
245	1	0	\|a Beam technologies for integrated processing : \|b report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
260			\|a Washington, D.C. : \|b National Academy Press, \|c 1992.
300			\|a 1 online resource (xii, 89 pages) : \|b illustrations
336			\|a text \|b txt \|2 rdacontent
337			\|a computer \|b c \|2 rdamedia
338			\|a online resource \|b cr \|2 rdacarrier
347			\|a data file \|2 rda
500			\|a "NMAB-461."
504			\|a Includes bibliographical references.
588	0		\|a Print version record.
506			\|3 Use copy \|f Restrictions unspecified \|2 star \|5 MiAaHDL
533			\|a Electronic reproduction. \|b [S.l.] : \|c HathiTrust Digital Library, \|d 2010. \|5 MiAaHDL
538			\|a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. \|u http://purl.oclc.org/DLF/benchrepro0212 \|5 MiAaHDL
583	1		\|a digitized \|c 2010 \|h HathiTrust Digital Library \|l committed to preserve \|2 pda \|5 MiAaHDL
590			\|a eBooks on EBSCOhost \|b EBSCO eBook Subscription Academic Collection - Worldwide
650		0	\|a Microelectronics industry.
650		0	\|a Molecular beams \|x Industrial applications.
650		0	\|a Microelectronics \|x Materials.
650		0	\|a Plasma-enhanced chemical vapor deposition \|x Industrial applications.
650		6	\|a Microélectronique \|x Industrie.
650		6	\|a Faisceaux moléculaires \|x Applications industrielles.
650		6	\|a Microélectronique \|x Matériaux.
650		6	\|a Dépôt chimique en phase vapeur activé par plasma \|x Applications industrielles.
650		7	\|a TECHNOLOGY & ENGINEERING \|x Electronics \|x Microelectronics. \|2 bisacsh
650		7	\|a TECHNOLOGY & ENGINEERING \|x Electronics \|x Digital. \|2 bisacsh
650		7	\|a Microelectronics industry \|2 fast
650		7	\|a Microelectronics \|x Materials \|2 fast
650		7	\|a Molecular beams \|x Industrial applications \|2 fast
650		7	\|a Plasma-enhanced chemical vapor deposition \|x Industrial applications \|2 fast
653		0	\|a Microelectronics \|a Materials
653		0	\|a Microelectronics industry
653		0	\|a Molecular \|a Industrial applications
653		0	\|a Plasma-enhanced \|a Industrial applications
776	0	8	\|i Print version: \|a National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. \|t Beam technologies for integrated processing. \|d Washington, D.C. : National Academy Press, 1992 \|z 0309046351 \|w (DLC) 92060205 \|w (OCoLC)26857491
856	4	0	\|u https://ebsco.uam.elogim.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14749 \|z Texto completo
938			\|a ebrary \|b EBRY \|n ebr10055022
938			\|a EBSCOhost \|b EBSC \|n 14749
938			\|a YBP Library Services \|b YANK \|n 2309611
938			\|a YBP Library Services \|b YANK \|n 6012572
938			\|a Askews and Holts Library Services \|b ASKH \|n AH36567092
938			\|a Internet Archive \|b INAR \|n beamtechnologies0000nati
994			\|a 92 \|b IZTAP

Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

MARC

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