Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Washington, D.C. : National Academy Press, 1992.
Temas:
Microelectronics industry.
Molecular beams > Industrial applications.
Microelectronics > Materials.
Plasma-enhanced chemical vapor deposition > Industrial applications.
Microélectronique > Industrie.
Faisceaux moléculaires > Applications industrielles.
Microélectronique > Matériaux.
Dépôt chimique en phase vapeur activé par plasma > Applications industrielles.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Microelectronics industry
Microelectronics > Materials
Molecular beams > Industrial applications
Plasma-enhanced chemical vapor deposition > Industrial applications
Molecular > Industrial applications
Plasma-enhanced > Industrial applications
Acceso en línea:Texto completo
Descripción
Notas:"NMAB-461."
Descripción Física:1 online resource (xii, 89 pages) : illustrations
Bibliografía:Includes bibliographical references.
ISBN:0585149453
9780585149455

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