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Plasma processing of materials : scientific opportunities and technological challenges /

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor Corporativo:	National Research Council (U.S.). Panel on Plasma Processing of Materials
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Washington, D.C. : National Academy Press, 1991.
Temas:	Plasma engineering. Microelectronics > Materials > Effect of radiation on. Surfaces (Technology) Technique des plasmas. Microélectronique > Matériaux > Effets du rayonnement sur. Surfaces (Technologie) TECHNOLOGY & ENGINEERING > Mechanical.
Acceso en línea:	Texto completo

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