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OCoLC |
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20240329122006.0 |
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m o d |
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cr cnu|||||||| |
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230209s2015 xx o ||| 0 eng d |
| 040 |
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|a EBLCP
|b eng
|c EBLCP
|d OCLCQ
|d EBLCP
|d OCLCQ
|d OCLCO
|d OCLCQ
|d OCLCL
|d OCLCQ
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| 020 |
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|a 9781119055495
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|a 1119055490
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| 035 |
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|a (OCoLC)1347025565
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| 082 |
0 |
4 |
|a 621.381
|q OCoLC
|2 23/eng/20230216
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| 049 |
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|a UAMI
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| 100 |
1 |
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|a Castañer, Luis.
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| 245 |
1 |
0 |
|a Understanding MEMS
|h [electronic resource] :
|b Principles and Applications.
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| 260 |
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|a Newark :
|b John Wiley & Sons, Incorporated,
|c 2015.
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| 300 |
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|a 1 online resource (401 p.).
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| 490 |
1 |
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|a New York Academy of Sciences Ser.
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| 500 |
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|a Description based upon print version of record.
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| 505 |
0 |
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|a Intro -- Title page -- Copyright -- Dedication -- Preface -- About the Companion Website -- 1 Scaling of Forces -- 1.1 Scaling of Forces Model -- 1.2 Weight -- 1.3 Elastic Force -- 1.4 Electrostatic Force -- 1.5 Capillary Force -- 1.6 Piezoelectric Force -- 1.7 Magnetic Force -- 1.8 Dielectrophoretic Force -- 1.9 Summary -- Problems -- Notes -- 2 Elasticity -- 2.1 Stress -- 2.2 Strain -- 2.3 Stress-strain Relationship -- 2.4 Strain-stress Relationship in Anisotropic Materials -- 2.5 Miller Indices -- 2.6 Angles of Crystallographic Planes
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|a 2.7 Compliance and Stiffness Matrices for Single-Crystal Silicon -- 2.8 Orthogonal Transformation -- 2.9 Transformation of the Stress State -- 2.10 Orthogonal Transformation of the Stiffness Matrix -- 2.11 Elastic Properties of Selected MEMS Materials -- Problems -- 3 Bending of Microstructures -- 3.1 Static Equilibrium -- 3.2 Free Body Diagram -- 3.3 Neutral Plane and Curvature -- 3.4 Pure Bending -- 3.5 Moment of Inertia and Bending Moment -- 3.6 Beam Equation -- 3.7 End-loaded Cantilever -- 3.8 Equivalent Stiffness -- 3.9 Beam Equation for Point Load and Distributed Load
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| 505 |
8 |
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|a 3.10 Castigliano's Second Theorem -- 3.11 Flexures -- 3.12 Rectangular Membrane -- 3.13 Simplified Model for a Rectangular Membrane Under Pressure -- 3.14 Edge-clamped Circular Membrane -- Problems -- 4 Piezoresistance and Piezoelectricity -- 4.1 Electrical Resistance -- 4.2 One-dimensional Piezoresistance Model -- 4.3 Piezoresistance in Anisotropic Materials -- 4.4 Orthogonal Transformation of Ohm's Law -- 4.5 Piezoresistance Coefficients Transformation -- 4.6 Two-dimensional Piezoresistors -- 4.7 Pressure Sensing with Rectangular Membranes -- 4.8 Piezoelectricity -- Problems -- Notes
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| 505 |
8 |
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|a 5 Electrostatic Driving and Sensing -- 5.1 Energy and Co-energy -- 5.2 Voltage Drive -- 5.3 Pull-in Voltage -- 5.4 Electrostatic Pressure -- 5.5 Contact Resistance in Parallel-plate Switches -- 5.6 Hold-down Voltage -- 5.7 Dynamic Response of Pull-in-based Actuators -- 5.8 Charge Drive -- 5.9 Extending the Stable Range -- 5.10 Lateral Electrostatic Force -- 5.11 Comb Actuators -- 5.12 Capacitive Accelerometer -- 5.13 Differential Capacitive Sensing -- 5.14 Torsional Actuator -- Problems -- Notes -- 6 Resonators -- 6.1 Free Vibration: Lumped-element Model -- 6.2 Damped Vibration
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| 505 |
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|a 6.3 Forced Vibration -- 6.4 Small Signal Equivalent Circuit of Resonators -- 6.5 Rayleigh-Ritz Method -- 6.6 Resonant Gyroscope -- 6.7 Tuning Fork Gyroscope -- Problems -- Notes -- 7 Microfluidics and Electrokinetics -- 7.1 Viscous Flow -- 7.2 Flow in a Cylindrical Pipe -- 7.3 Electrical Double Layer -- 7.4 Electro-osmotic Flow -- 7.5 Electrowetting -- 7.6 Electrowetting Dynamics -- 7.7 Dielectrophoresis -- Problems -- Notes -- 8 Thermal Devices -- 8.1 Steady-state Heat Equation -- 8.2 Thermal Resistance -- 8.3 Platinum Resistors -- 8.4 Flow Measurement Based on Thermal Sensors
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| 500 |
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|a 8.5 Dynamic Thermal Equivalent Circuit
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| 590 |
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|a ProQuest Ebook Central
|b Ebook Central Academic Complete
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| 655 |
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0 |
|a Electronic books.
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| 758 |
|
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|i has work:
|a Understanding MEMS (Text)
|1 https://id.oclc.org/worldcat/entity/E39PCFJ39hyXP8BtxgqTtFMGxP
|4 https://id.oclc.org/worldcat/ontology/hasWork
|
| 776 |
0 |
8 |
|i Print version:
|a Castañer, Luis
|t Understanding MEMS
|d Newark : John Wiley & Sons, Incorporated,c2015
|z 9781119055426
|
| 830 |
|
0 |
|a New York Academy of Sciences Ser.
|
| 856 |
4 |
0 |
|u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=7104387
|z Texto completo
|
| 938 |
|
|
|a ProQuest Ebook Central
|b EBLB
|n EBL7104387
|
| 994 |
|
|
|a 92
|b IZTAP
|
