Wafer fabrication : automated material handling systems /

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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Zhang, Jie, 1963 September 21- (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin ; Boston : Walter de Gruyter GmbH, [2018]
Temas:
Semiconductor wafers > Automatic control.
Manufacturing processes > Automatic control.
Plaquettes à gravure en semi-conducteurs > Commande automatique.
Fabrication > Commande automatique.
TECHNOLOGY & ENGINEERING > Mechanical.
Manufacturing processes > Automatic control
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Frontmatter
  • Preface
  • Contents
  • 1 Semiconductor wafer fabrication system
  • 2 Automated material handling systems in SWFSs
  • 3 Modeling methods of automated material handling systems in SWFSs
  • 4 Analysis of automated material handling systems in SWFSs
  • 5 Scheduling methods of automated material handling systems in SWFSs
  • 6 Scheduling in Interbay automated material handling systems
  • 7 Scheduling in Intrabay automatic material handling systems
  • 8 Integrated scheduling in AMHSs
  • 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs
  • Index

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