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Wafer fabrication : automated material handling systems /
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin ; Boston :
Walter de Gruyter GmbH,
[2018]
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | EBOOKCENTRAL_on1076270650 | ||
| 003 | OCoLC | ||
| 005 | 20240329122006.0 | ||
| 006 | m o d | ||
| 007 | cr cnu---unuuu | ||
| 008 | 181126s2018 gw a ob 001 0 eng d | ||
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| 020 | |a 9783110487473 |q (electronic book) | ||
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| 035 | |a (OCoLC)1076270650 |z (OCoLC)1059296326 |z (OCoLC)1162330627 |z (OCoLC)1290075030 |z (OCoLC)1296540686 |z (OCoLC)1300623918 |z (OCoLC)1303396482 | ||
| 050 | 4 | |a TK7871.85 |b .Z43 2018 | |
| 072 | 7 | |a TEC |x 009070 |2 bisacsh | |
| 082 | 0 | 4 | |a 621.39/5 |2 23 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Zhang, Jie, |d 1963 September 21- |e author. |1 https://id.oclc.org/worldcat/entity/E39PCjDTGRxDPm6fJ3y3B9tD4q | |
| 245 | 1 | 0 | |a Wafer fabrication : |b automated material handling systems / |c Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang. |
| 264 | 1 | |a Berlin ; |a Boston : |b Walter de Gruyter GmbH, |c [2018] | |
| 300 | |a 1 online resource (xi, 272 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file | ||
| 347 | |b PDF | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | 0 | |t Frontmatter -- |t Preface -- |t Contents -- |t 1 Semiconductor wafer fabrication system -- |t 2 Automated material handling systems in SWFSs -- |t 3 Modeling methods of automated material handling systems in SWFSs -- |t 4 Analysis of automated material handling systems in SWFSs -- |t 5 Scheduling methods of automated material handling systems in SWFSs -- |t 6 Scheduling in Interbay automated material handling systems -- |t 7 Scheduling in Intrabay automatic material handling systems -- |t 8 Integrated scheduling in AMHSs -- |t 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- |t Index |
| 546 | |a In English. | ||
| 588 | 0 | |a Online resource; title from digital title page (viewed on December 11, 2018). | |
| 520 | |a This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. | ||
| 590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
| 590 | |a eBooks on EBSCOhost |b EBSCO eBook Subscription Academic Collection - Worldwide | ||
| 650 | 0 | |a Semiconductor wafers |x Automatic control. | |
| 650 | 0 | |a Manufacturing processes |x Automatic control. | |
| 650 | 6 | |a Plaquettes à gravure en semi-conducteurs |x Commande automatique. | |
| 650 | 6 | |a Fabrication |x Commande automatique. | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Mechanical. |2 bisacsh | |
| 650 | 7 | |a Manufacturing processes |x Automatic control |2 fast | |
| 758 | |i has work: |a Wafer fabrication (Text) |1 https://id.oclc.org/worldcat/entity/E39PCFYB3CBprF46XRt8Q89gPP |4 https://id.oclc.org/worldcat/ontology/hasWork | ||
| 776 | 0 | 8 | |i Print version: |a Zhang, Jie, 1963 September 21- |t Wafer fabrication. |d Berlin ; Boston : De Gruyter, [2018] |z 9783110486902 |w (DLC) 2018007853 |w (OCoLC)1024215291 |
| 856 | 4 | 0 | |u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=5574735 |z Texto completo |
| 938 | |a De Gruyter |b DEGR |n 9783110487473 | ||
| 938 | |a ProQuest Ebook Central |b EBLB |n EBL5574735 | ||
| 938 | |a EBSCOhost |b EBSC |n 1926786 | ||
| 938 | |a YBP Library Services |b YANK |n 13158624 | ||
| 994 | |a 92 |b IZTAP | ||