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Ultrathin Calcium Titanate Capacitors : Physics and Application.
Annotation
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Berlin :
Logos Verlag Berlin,
2014.
|
| Colección: | Research at NaMLab Ser.
|
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Intro; 1 Introduction; 1.1 Motivation; 1.2 Structure of this work; 2 Fundamentals of materials and electrical properties; 2.1 Calcium titanate; 2.1.1 Structure; 2.1.2 Optical properties and band gap; 2.1.3 Permittivity of CaTiO3; 2.1.4 Current applications for CaTiO3; 2.2 Metals and conducting metal composites for applicable high temperature processes; 2.3 Non-linearity of dielectric permittivity; 2.4 Leakage current mechanisms; 2.4.1 Schottky emission; 2.4.2 Tunneling; 2.4.3 Poole-Frenkel effect; 2.4.4 Trap-assisted tunneling; 2.5 Dielectric relaxation.
- 2.6 Amorphous versus crystalline dielectric layers3 Sample Preparation and Methods; 3.1 Sample Preparation of metal-insulator-metal capacitors; 3.1.1 Sputtering of electrodes and high-k dielectrics; 3.1.2 Standard parameters for metal deposition; 3.1.3 Parameters for dielectric deposition; 3.1.4 Structuring of top electrodes; 3.2 Physical characterization; 3.3 Electrical characterization; 3.3.1 Current voltage measurements; 3.3.2 Leakage current measurements at different temperatures; 3.3.3 Capacitance voltage measurements; 3.3.4 Relaxation measurements.
- 4 Temperature stable high work function electrodes4.1 Sputter deposition of electrodes; 4.1.1 Titanium nitride layers; 4.1.2 Ruthenium and Ruthenium dioxide layers; 4.1.3 Platinum electrodes; 4.1.4 Platinum on Titanium nitride; 4.2 CVD deposition of carbon electrodes; 4.3 Conclusion; 5 Physical investigation of calcium titanate layers; 5.1 Experiments on optical properties and density of CaTiO3 layers; 5.1.1 Refractive index and extinction coefficient of CaTiO3; 5.1.2 Band gap determination with low energy electron energy loss spectroscopy; 5.1.3 Density approximation with X-Ray reflectance.
- 5.2 X-ray photoelectron spectroscopy of CaTiO3 layers5.3 Stoichiometry of CaTiO3 layers; 5.4 Roughness and crystallinity of CaTiO3 layers; 5.4.1 Surface roughness; 5.4.2 Crystallization of CaTiO3; 5.5 Conclusion and summary; 6 TEM characterization on crystallinity of CaTiO3; 6.1 Crystallization behavior at 550â#x97;ŒC; 6.2 Strain in dielectric layer induced by top electrode; 6.3 Comparison of post deposition anneals and CaTiO3 crystallization during growth; 6.4 Nanocrystals of CaTiO3 in an amorphous matrix; 6.5 Discussion of preferential growth; 6.6 Conclusion.
- 7 Electrical characterization of CaTiO3 in MIM capacitor stacks7.1 The relation between physical and electrical properties of CaTiO3 MIM capacitors; 7.2 Capacitance measurements of CaTiO3 capacitors; 7.2.1 Capacitance dependence on thickness; 7.2.2 Non-linear voltage dependence of capacitance; 7.2.3 Temperature dependence of capacitance; 7.2.4 Frequency dependence of CaTiO3 capacitance; 7.3 Leakage currents in CaTiO3 capacitors; 7.3.1 The influence of different electrodes; 7.3.2 Thickness dependence of leakage currents; 7.3.3 Temperature dependence of leakage currents; 7.4 Relaxation.