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Modellierung und Simulation Nichtlinearer Effekte in Kapazitiv Gekoppelten Hochfrequenzplasmen.

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Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor principal:	Ziegler, Dennis
Formato:	Electrónico eBook
Idioma:	Alemán
Publicado:	Berlin : Logos Verlag Berlin, 2010.
Temas:	Nonlinear mechanics. Mécanique non linéaire. Nonlinear mechanics
Acceso en línea:	Texto completo

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