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160914s2011 flu ob 001 0 eng d |
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|a 908077533
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|a TP248.25.B54
|b M33 2011
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|a MQW
|2 bicscc
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|a 681.2
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|a UAMI
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100 |
1 |
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|a Madou, Marc J.
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245 |
1 |
0 |
|a From MEMS to Bio-MEMS and Bio-NEMS :
|b manufacturing techniques and applications /
|c Marc J. Madou.
|
260 |
|
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|a Boca Raton, FL :
|b Taylor & Francis,
|c 2011.
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300 |
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|a 1 online resource
|
336 |
|
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|a text
|b txt
|2 rdacontent
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|a computer
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|2 rdamedia
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|
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|a online resource
|b cr
|2 rdacarrier
|
504 |
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|a Includes bibliographical references and index.
|
520 |
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|a "Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download"--
|c Provided by publisher.
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520 |
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|a "In Part I we compare available manufacturing options for MEMS and NEMS, introduce inspection options for the produced parts (metrology) and summarize available modeling software for MEMS and NEMS. Of the three Chapters in Part II, the first deals with scaling laws, the second with actuators, and the third discusses issues surrounding power generation and the implementation of brains in miniaturized devices. In Part III, Chapter 10 we review the MEMS and NEMS markets"--
|c Provided by publisher.
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505 |
0 |
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|a Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices.
|
590 |
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|a ProQuest Ebook Central
|b Ebook Central Academic Complete
|
650 |
|
0 |
|a BioMEMS.
|
650 |
|
0 |
|a Nanoelectromechanical systems.
|
650 |
|
6 |
|a BioMEMS.
|
650 |
|
6 |
|a Nanosystèmes électromécaniques.
|
650 |
|
7 |
|a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics.
|2 bisacsh
|
650 |
|
7 |
|a TECHNOLOGY & ENGINEERING / Material Science.
|2 bisacsh
|
650 |
|
7 |
|a BioMEMS
|2 fast
|
650 |
|
7 |
|a Nanoelectromechanical systems
|2 fast
|
758 |
|
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|i has work:
|a From MEMS to bioMS and bioMS (Text)
|1 https://id.oclc.org/worldcat/entity/E39PCFJpHXRPXgK9gJGk7jcvRC
|4 https://id.oclc.org/worldcat/ontology/hasWork
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776 |
0 |
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|z 9781420055160
|
856 |
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|u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=1446478
|z Texto completo
|
938 |
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|a Taylor & Francis
|b TAFR
|n CRC0KE15350PDF
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938 |
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|a ProQuest Ebook Central
|b EBLB
|n EBL1446478
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|a YBP Library Services
|b YANK
|n 12368248
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938 |
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|a Taylor & Francis
|b TAFR
|n 9780429109218
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