Plasma Processing of Materials : Scientific Opportunities and Technological Challenges.

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Staff, National Research Council
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Washington : National Academies Press, 2005.
Temas:
Plasma engineering.
Microelectronics > Materials > Effect of radiation on.
Surfaces (Technology)
Technique des plasmas.
Microélectronique > Matériaux > Effets du rayonnement sur.
Surfaces (Technologie)
Microelectronics > Materials > Effect of radiation on
Plasma engineering
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Plasma Processing of Materials:
  • Copyright
  • Preface
  • Acknowledgments
  • Contents
  • 1 Summary, Findings, Conclusions, And Recommendations
  • SUMMARY
  • FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS
  • 2 Plasma Processing And Low-Energy Plasma Science
  • CLASSIFICATION OF PLASMAS
  • BRIEF HISTORY OF LOW-ENERGY PLASMA SCIENCE AND TECHNOLOGY
  • INDUSTRIAL APPLICATIONS OF PLASMA PROCESSING OF MATERIALS
  • INTERFACE BETWEEN BASIC PLASMA SCIENCE AND APPLICATIONS
  • SCOPE OF THIS REPORT
  • 3 Plasma Processing In The Electronics Industry
  • MICROELECTRONICS FABRICATIONPLASMA ETCHING
  • Anisotropy
  • Selectivity
  • Uniformity
  • Damage
  • New Materials
  • PLASMA DEPOSITION
  • Planarization, Filling, and Interconnection
  • Surface Modification
  • New Materials
  • PLASMA CLEANING
  • LOW-PRESSURE PLASMA REACTOR TECHNOLOGY
  • Single-Wafer Processing
  • Process Control
  • New Plasma Sources
  • Magnetic Confinement
  • Downstream Processing
  • Modulated Processing
  • Clustered Processing
  • THERMAL PLASMA REACTOR TECHNOLOGY
  • TOWARD FLEXIBLE MICROELECTRONICS MANUFACTURING
  • FINDINGS AND CONCLUSIONS4 Scientific Foundation of Plasma Processing
  • SURFACE PROCESSES
  • Theory and Simulation
  • Experimental Studies
  • Beam-Surface Experiments
  • Ex Situ Analysis
  • PLASMA GENERATION AND TRANSPORT
  • Low-Pressure Plasma Modeling
  • Analysis
  • Fluid Simulations
  • Particle-In-Cell and Kinetic Simulations
  • Thermal Plasma Modeling
  • Toward Cad Tools And Expert Systems
  • Chemical Kinetics
  • Multidimensional Modeling and Magnetic Effects
  • Stability of Processing Plasmas
  • Accuracy and Reliability of Numerical Simulation MethodsPlasma Diagnostics
  • Positive Ions and Neutrals
  • Electron Density and Energy Distribution
  • Fields
  • Negative Ions
  • Particulates
  • Reference Reactors
  • Data Base for Plasma Generation and Transport
  • Present Status
  • Needs
  • Distribution of Information
  • PLASMA-SURFACE INTERACTIONS
  • Boundary Conditions
  • Passive Surfaces
  • Particulates
  • Microstructure Evolution
  • In Situ Analysis
  • FUNDING FOR PLASMA PROCESSING RESEARCH
  • Japanese Research
  • French Research
  • FINDINGS AND CONCLUSIONS5 Educational Issues
  • EDUCATIONAL REQUIREMENTS FOR UNDERGRADUATES
  • Laboratory Courses and the Scientific Method
  • Research Experiences and Cooperative Programs
  • U.S. GRADUATE EDUCATION
  • TEXTS AND COMPUTER-AIDED INSTRUCTION
  • FACULTY DEVELOPMENT
  • CONTINUING EDUCATION
  • FOREIGN EDUCATIONAL OFFERINGS
  • Japan
  • France
  • FINDINGS AND CONCLUSIONS
  • Appendix Participants in Workshop on Plasma Processing of Materials

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