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Plasma Processing of Materials : Scientific Opportunities and Technological Challenges.

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor principal:	Staff, National Research Council
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Washington : National Academies Press, 2005.
Temas:	Plasma engineering. Microelectronics > Materials > Effect of radiation on. Surfaces (Technology) Technique des plasmas. Microélectronique > Matériaux > Effets du rayonnement sur. Surfaces (Technologie) Microelectronics > Materials > Effect of radiation on Plasma engineering
Acceso en línea:	Texto completo

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