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151010s2005 dcu o 000 0 eng d |
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|a 9780309583756
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|a 0309583756
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|a (OCoLC)923262698
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|a TA2005.N37
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|a 621.044
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|a UAMI
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|a Staff, National Research Council.
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|a Plasma Processing of Materials :
|b Scientific Opportunities and Technological Challenges.
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| 260 |
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|a Washington :
|b National Academies Press,
|c 2005.
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| 300 |
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|a 1 online resource (88 pages)
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a Print version record.
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|a Plasma Processing of Materials: -- Copyright -- Preface -- Acknowledgments -- Contents -- 1 Summary, Findings, Conclusions, And Recommendations -- SUMMARY -- FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS -- 2 Plasma Processing And Low-Energy Plasma Science -- CLASSIFICATION OF PLASMAS -- BRIEF HISTORY OF LOW-ENERGY PLASMA SCIENCE AND TECHNOLOGY -- INDUSTRIAL APPLICATIONS OF PLASMA PROCESSING OF MATERIALS -- INTERFACE BETWEEN BASIC PLASMA SCIENCE AND APPLICATIONS -- SCOPE OF THIS REPORT -- 3 Plasma Processing In The Electronics Industry
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|a MICROELECTRONICS FABRICATIONPLASMA ETCHING -- Anisotropy -- Selectivity -- Uniformity -- Damage -- New Materials -- PLASMA DEPOSITION -- Planarization, Filling, and Interconnection -- Surface Modification -- New Materials -- PLASMA CLEANING -- LOW-PRESSURE PLASMA REACTOR TECHNOLOGY -- Single-Wafer Processing -- Process Control -- New Plasma Sources -- Magnetic Confinement -- Downstream Processing -- Modulated Processing -- Clustered Processing -- THERMAL PLASMA REACTOR TECHNOLOGY -- TOWARD FLEXIBLE MICROELECTRONICS MANUFACTURING
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|a FINDINGS AND CONCLUSIONS4 Scientific Foundation of Plasma Processing -- SURFACE PROCESSES -- Theory and Simulation -- Experimental Studies -- Beam-Surface Experiments -- Ex Situ Analysis -- PLASMA GENERATION AND TRANSPORT -- Low-Pressure Plasma Modeling -- Analysis -- Fluid Simulations -- Particle-In-Cell and Kinetic Simulations -- Thermal Plasma Modeling -- Toward Cad Tools And Expert Systems -- Chemical Kinetics -- Multidimensional Modeling and Magnetic Effects -- Stability of Processing Plasmas
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| 505 |
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|a Accuracy and Reliability of Numerical Simulation MethodsPlasma Diagnostics -- Positive Ions and Neutrals -- Electron Density and Energy Distribution -- Fields -- Negative Ions -- Particulates -- Reference Reactors -- Data Base for Plasma Generation and Transport -- Present Status -- Needs -- Distribution of Information -- PLASMA-SURFACE INTERACTIONS -- Boundary Conditions -- Passive Surfaces -- Particulates -- Microstructure Evolution -- In Situ Analysis -- FUNDING FOR PLASMA PROCESSING RESEARCH -- Japanese Research -- French Research
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|a FINDINGS AND CONCLUSIONS5 Educational Issues -- EDUCATIONAL REQUIREMENTS FOR UNDERGRADUATES -- Laboratory Courses and the Scientific Method -- Research Experiences and Cooperative Programs -- U.S. GRADUATE EDUCATION -- TEXTS AND COMPUTER-AIDED INSTRUCTION -- FACULTY DEVELOPMENT -- CONTINUING EDUCATION -- FOREIGN EDUCATIONAL OFFERINGS -- Japan -- France -- FINDINGS AND CONCLUSIONS -- Appendix Participants in Workshop on Plasma Processing of Materials
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| 590 |
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|a ProQuest Ebook Central
|b Ebook Central Academic Complete
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| 650 |
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0 |
|a Plasma engineering.
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| 650 |
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|a Microelectronics
|x Materials
|x Effect of radiation on.
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| 650 |
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|a Surfaces (Technology)
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| 650 |
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|a Technique des plasmas.
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| 650 |
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6 |
|a Microélectronique
|x Matériaux
|x Effets du rayonnement sur.
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| 650 |
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6 |
|a Surfaces (Technologie)
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| 650 |
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7 |
|a Microelectronics
|x Materials
|x Effect of radiation on
|2 fast
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| 650 |
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7 |
|a Plasma engineering
|2 fast
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| 650 |
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7 |
|a Surfaces (Technology)
|2 fast
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| 776 |
0 |
8 |
|i Print version:
|a Staff, National Research Council.
|t Plasma Processing of Materials : Scientific Opportunities and Technological Challenges.
|d Washington : National Academies Press, ©1900
|z 9780309045971
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| 856 |
4 |
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|u https://ebookcentral.uam.elogim.com/lib/uam-ebooks/detail.action?docID=3376299
|z Texto completo
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| 938 |
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|a EBL - Ebook Library
|b EBLB
|n EBL3376299
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| 994 |
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|a 92
|b IZTAP
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